Capacitor and semiconductor device including the same
US-2024387608-A1 · Nov 21, 2024 · US
Embedded three-dimensional capacitor
US9105602B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9105602-B2 |
| Application number | US-201414179239-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 12, 2014 |
| Priority date | Dec 23, 2013 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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Abstract
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An embedded capacitor is provided that includes a substrate having a dielectric-filled window. A metal-insulator-metal structure lines a plurality of vias extending through the dielectric-filled window and covers at least partially opposing sides of the dielectric-filled window.
First claim
Opening claim text (preview).
We claim: 1. A device, comprising: a substrate; a window extending through the substrate; a dielectric material within the window; a plurality of vias extending from a first side of the dielectric material to an opposing second side of the dielectric material; and a metal-insulator-metal (MIM) structure lining the vias and at least partially lining the first and second sides of the dielectric material, wherein an electrode layer in the MIM structure includes a gap outside of the w…
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Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9105602B2 cover?
- An embedded capacitor is provided that includes a substrate having a dielectric-filled window. A metal-insulator-metal structure lines a plurality of vias extending through the dielectric-filled window and covers at least partially opposing sides of the dielectric-filled window.
- Who is the assignee on this patent?
- Qualcomm Inc
- What technology area does this patent fall under?
- Primary CPC classification H10D1/716. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Aug 11 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).