Semiconductor structure having material layers which are level with each other and manufacturing method thereof

US9105590B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9105590-B2
Application numberUS-201113206523-A
CountryUS
Kind codeB2
Filing dateAug 10, 2011
Priority dateAug 10, 2011
Publication dateAug 11, 2015
Grant dateAug 11, 2015

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Abstract

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A semiconductor structure is provided in the present invention. The semiconductor structure includes a substrate, a first material layer and a second material layer. A trench region is defined on the substrate. The trench region includes two separated first regions and a second region, wherein the second region is adjacent to and between the two first regions. The first material layer is disposed on the substrate outside the trench region. The second material layer is disposed in the second region and is level with the first material layer.

First claim

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What is claimed is: 1. A semiconductor structure, comprising: a substrate having at least a trench region, wherein from top view of the substrate, the trench region includes two separated first regions, and a second region between and adjacent to the two first regions; a first material layer disposed on the substrate outside the trench region; a second material layer disposed in the second region; and a third material layer only disposed in the first regions, wherein a top s…

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What does patent US9105590B2 cover?
A semiconductor structure is provided in the present invention. The semiconductor structure includes a substrate, a first material layer and a second material layer. A trench region is defined on the substrate. The trench region includes two separated first regions and a second region, wherein the second region is adjacent to and between the two first regions. The first material layer is dispos…
Who is the assignee on this patent?
Chen Tong-Yu, United Microelectronics Corp
What technology area does this patent fall under?
Primary CPC classification H10P50/71. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Aug 11 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).