Substrate correction device, substrate lamination device, substrate processing system, substrate correction method, substrate processing method, and semiconductor device manufacturing method
US-2024404859-A1 · Dec 5, 2024 · US
US9105561B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9105561-B2 |
| Application number | US-201213471306-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 14, 2012 |
| Priority date | May 14, 2012 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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A system, method, and apparatus for layered bonded structures formed from reactive bonding between zinc metal and zinc peroxide are disclosed herein. In particular, the present disclosure teaches a layered bonded structure wherein two structures are bonded together with a layer including zinc oxide. The zinc oxide is formed through a method that includes processing the two structures by contacting the structures under pressure and applying heat to the structures to promote a reaction with zinc peroxide and zinc metal on one or both of the two structures.
Opening claim text (preview).
I claim: 1. A method of forming a bonded layered structure, comprising: providing a first structure and a second structure; forming a first layer comprising zinc peroxide on at least one of the first and second structures; forming a second layer comprising zinc metal on at least one of the first and second structures; contacting the first and second structures such that the first layer contacts the second layer, such contact occurring between the first and second structures;…
Electricity · mapped topic
Cross-Sectional Technologies · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
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