Nanowire PIN tunnel field effect devices

US9105482B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9105482-B2
Application numberUS-201213556300-A
CountryUS
Kind codeB2
Filing dateJul 24, 2012
Priority dateJan 8, 2010
Publication dateAug 11, 2015
Grant dateAug 11, 2015

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Abstract

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A nanowire tunnel device includes a nanowire suspended above a semiconductor substrate by a first pad region and a second pad region, the nanowire having a channel portion surrounded by a gate structure disposed circumferentially around the nanowire, an n-type doped region including a first portion of the nanowire adjacent to the channel portion, and a p-type doped region including a second portion of the nanowire adjacent to the channel portion.

First claim

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What is claimed is: 1. A nanowire tunnel device, comprising: a nanowire spaced apart and above a semiconductor substrate by a first pad region and a second pad region, the nanowire having a channel portion surrounded by a gate structure disposed circumferentially around the nanowire, the gate structure comprising a metal layer and a conductive polysilicon capping layer disposed directly onto and encapsulating the metal layer; a first protective spacer adjacent to a sidewall of t…

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What does patent US9105482B2 cover?
A nanowire tunnel device includes a nanowire suspended above a semiconductor substrate by a first pad region and a second pad region, the nanowire having a channel portion surrounded by a gate structure disposed circumferentially around the nanowire, an n-type doped region including a first portion of the nanowire adjacent to the channel portion, and a p-type doped region including a second por…
Who is the assignee on this patent?
Bangsaruntip Sarunya, Koester Stephen J, Majumdar Amlan, and 2 more
What technology area does this patent fall under?
Primary CPC classification H10P30/222. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Aug 11 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).