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Distributed power arrangements for localizing power delivery
US9105449B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9105449-B2 |
| Application number | US-14538908-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 24, 2008 |
| Priority date | Jun 29, 2007 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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Abstract
Official abstract text for this publication.
A distributed power arrangement to provide local power delivery in a plasma processing system during substrate processing is provided. The distributed power arrangement includes a set of direct current (DC) power supply units. The distributed power arrangement also includes a plurality of power generators, which is configured to receive power from the set of DC power supply units. Each power generator of the plurality of power generators is coupled to a set of electrical elements, thereby enabling the each power generator of the plurality of power generators to control the local power delivery.
First claim
Opening claim text (preview).
What is claimed is: 1. A distributed power arrangement to provide local power delivery in a plasma processing system during substrate processing, comprising: a single direct current (DC) power supply; a common rail arrangement coupled to the DC power supply; and a plurality of power generators coupled to a single chamber, said plurality of power generators being configured to receive power from said single DC power supply via the common rail arrangement, wherein each power gen…
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Electricity · mapped topic
Electricity · mapped topic
- H01J37/32045Primary
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9105449B2 cover?
- A distributed power arrangement to provide local power delivery in a plasma processing system during substrate processing is provided. The distributed power arrangement includes a set of direct current (DC) power supply units. The distributed power arrangement also includes a plurality of power generators, which is configured to receive power from the set of DC power supply units. Each power ge…
- Who is the assignee on this patent?
- Benjamin Neil, Lam Res Corp
- What technology area does this patent fall under?
- Primary CPC classification H01J37/32045. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Aug 11 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).