Particle beam microscope
US-2024304409-A1 · Sep 12, 2024 · US
Apparatus of plural charged particle beams with multi-axis magnetic lens
US9105440B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9105440-B2 |
| Application number | US-201414468674-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 26, 2014 |
| Priority date | Aug 30, 2013 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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Abstract
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An apparatus of plural charged particle beams with multi-axis magnetic lens is provided to perform multi-functions of observing a specimen surface, such as high-throughput inspection and high-resolution review of interested features thereof and charge-up control for enhancing image contrast and image resolution. In the apparatus, two or more sub-columns are formed and each of the sub-columns performs one of the multi-functions. Basically the sub-columns take normal illumination to get high image resolutions, but one or more may take oblique illuminations to get high image contrasts.
First claim
Opening claim text (preview).
What is claimed is: 1. An apparatus of plural charged particle beams, comprising: a specimen stage, which sustains a specimen thereon; and multiple sub-columns, which are placed above an observed surface of said specimen and respectively perform one of multiple functions for observing said observed surface, wherein a first function of said multiple functions is high-throughput inspection of interested features on said observed surface, and a second function of said multiple fu…
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Electricity · mapped topic
Electricity · mapped topic
- H01J37/141Primary
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US9105440B2 cover?
- An apparatus of plural charged particle beams with multi-axis magnetic lens is provided to perform multi-functions of observing a specimen surface, such as high-throughput inspection and high-resolution review of interested features thereof and charge-up control for enhancing image contrast and image resolution. In the apparatus, two or more sub-columns are formed and each of the sub-columns pe…
- Who is the assignee on this patent?
- Hermes Microvision Inc, Hermes Microvision Inc
- What technology area does this patent fall under?
- Primary CPC classification H01J37/141. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Aug 11 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).