Testing of semiconductor chips with microbumps
US-2015362526-A1 · Dec 17, 2015 · US
Automatic probe configuration station and method therefor
US9103876B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9103876-B2 |
| Application number | US-201113521034-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 7, 2011 |
| Priority date | Jan 8, 2010 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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- Title
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- Abstract
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Abstract
Official abstract text for this publication.
A probe system for facilitating the inspection of a device under test. System incorporates a storage rack; a probe bar gantry assembly; a probe assembly configured to electrically mate the device under test; and a robot system for picking the probe assembly from the storage rack and deliver the probe assembly to the probe bar gantry. The robot system is also enabled to pick a probe assembly from the probe bar gantry and deliver the probe assembly to the storage rack. The probe assembly includes a clamping assembly for attaching the probe assembly to the probe bar gantry or the storage rack. The probe assembly may include an array of contact pins configured to mate with conductive pads on the device under test when the probe assembly is installed on the probe bar gantry assembly.
First claim
Opening claim text (preview).
What is claimed is: 1. A probe system for inspection of a device under test, the probe system comprising: a. a storage rack; b. a probe bar gantry assembly; c. a probe assembly configured to electrically mate the device under test; and d. a robot system configured to pick the probe assembly from the storage rack and deliver the probe assembly to the probe bar gantry, the robot system being further configured to pick a probe assembly from the probe bar gantry and deliver the…
Assignees
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Classifications
- G01R31/2893Primary
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
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Frequently asked questions
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- What does patent US9103876B2 cover?
- A probe system for facilitating the inspection of a device under test. System incorporates a storage rack; a probe bar gantry assembly; a probe assembly configured to electrically mate the device under test; and a robot system for picking the probe assembly from the storage rack and deliver the probe assembly to the probe bar gantry. The robot system is also enabled to pick a probe assembly fro…
- Who is the assignee on this patent?
- Nguyen Kent, Gangakhedkar Kaushal, Baldwin David, and 11 more
- What technology area does this patent fall under?
- Primary CPC classification G01R31/2893. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Aug 11 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).