Composite Fabry-Pérot sensor

Patent metadata

Field	Value
Publication number	US-9103727-B2
Application number	US-201213729983-A
Country	US
Kind code	B2
Filing date	Dec 28, 2012
Priority date	Jan 3, 2012
Publication date	Aug 11, 2015
Grant date	Aug 11, 2015

Abstract

A self-referencing composite Fabry-Pérot cavity sensor, including methods of use and manufacture. The cavity sensor comprises a substrate defining a first cavity portion juxtaposed to a second cavity portion. The first and second cavity portions are provided having a predetermined depth offset. A polymer or other dielectric material is disposed within the first and second cavity portions. An interference spectrum resulting from a light source of a known wavelength is reflected through the sensor and produces a first refractive index from the first cavity portion offset by a second refractive index from the second cavity portion. The difference in refractive indices can be used to determine various physical parameters. An optical sensor according to the present technology may be used with vapor sensing, pressure sensing, protein detection, photo-acoustic imaging, and the like.

First claim

What is claimed is:

1. An optical sensor device, comprising:
a substrate;
a first cavity portion disposed within the substrate and having a first depth;
a second cavity portion disposed within the substrate and having a second depth; and
a dielectric material disposed within the first and second cavity portions,
wherein the first cavity portion is juxtaposed to the second cavity portion and the first depth is offset by a predetermined distance from the second depth.…

Assignees

• Univ Michigan

Inventors

• Fan Xudong
• Reddy Karthik
• Guo Yunbo

Classifications

• G01J3/45 Primary

  Physics · mapped topic

• G01N21/274 Primary

  Physics · mapped topic

• G01N21/39

  Physics · mapped topic

• G01N30/74

  Physics · mapped topic