Combined environmental parameter sensor

Patent metadata

Field	Value
Publication number	US-9103705-B2
Application number	US-201213406439-A
Country	US
Kind code	B2
Filing date	Feb 27, 2012
Priority date	Feb 27, 2012
Publication date	Aug 11, 2015
Grant date	Aug 11, 2015

Abstract

A combination sensor and corresponding method of measuring a plurality of environmental parameters uses a pressure sensor disposed on an integrated circuit die; a humidity sensor disposed on the integrated circuit die; and a circuit coupled to and shared by the pressure sensor and the humidity sensor to facilitate pressure and humidity sensing.

First claim

What is claimed is:

1. A combination sensor comprising:
a pressure sensor disposed on a die, the die including a semiconductor material, wherein the pressure sensor is comprised of four piezo resistive transducers arranged in a first Wheatstone bridge configuration;
a humidity sensor disposed on the die, wherein the humidity sensor is comprised of another four piezo resistive transducers arranged in a second Wheatstone bridge configuration; and
a circuitry disposed on the die and coupled to and shared by the pressure sensor and the humidity sensor to facilitate pressure and humidity sensing,
wherein the circuitry comprises one or more bond pads and traces that provide one or more common bias voltages to both the pressure sensor and the humidity sensor, and the circuitry further comprises first and second traces on the die for coupling the bias voltages to opposite corners of the first Wheatstone bridge configuration and the second Wheatstone bridge configuration and pressure sensing traces for coupling pressure sensing signals from the other opposite corners of the first Wheatstone bridge configuration and humidity sensing traces for coupling humidity sensing signals from the other opposite corners of the second Wheatstone bridge configuration.

2. The combination sensor of claim 1 further comprising a sensor package encasing the pressure sensor and the humidity sensor.

3. The combination sensor of claim 1 wherein the die further comprises a first diaphragm associated with the pressure sensor and a second diaphragm associated with the humidity sensor.

4. The combination sensor of claim 3 wherein the first diaphragm and the second diaphragm are formed on a same layer of the die.

5. A combination sensor comprising:
a pressure sensor disposed on a die, the die including a semiconductor material;
a humidity sensor disposed on the die, wherein the die comprises a vent opening to equalize pressure effects on the humidity sensor; and
a circuitry disposed on the die and coupled to and shared by the pressure sensor and the humidity sensor to facilitate pressure and humidity sensing,
wherein the die and one or more of the humidity sensor and pressure sensor are arranged and configured to facilitate offsetting any pressure effects on the humidity sensor.

6. The combination sensor of claim 5 wherein the vent opening is through a backside of the die.

7. The combination sensor of claim 5 wherein values from the pressure sensor are used to offset the pressure effects on values from the humidity sensor.

8. The combination sensor of claim 7 wherein a portion of the values from the pressure sensor are subtracted from the values from the humidity sensor to offset the pressure effects on values from the humidity sensor.

9. A method of measuring a plurality of environmental parameters, the method comprising:
obtaining a first value corresponding to pressure from a pressure sensor disposed on a die;
obtaining a second value corresponding to humidity from a humidity sensor disposed on the die, wherein the die comprises a vent opening to equalize pressure effects on a diaphragm for the humidity sensor;
providing a pressure parameter using at least one of the first value and the second value; and
providing a humidity parameter using at least one of the first value and the second value,
wherein any pressure effects on the humidity sensor are equalized.

10. The method of claim 9 wherein the die is encased in a sensor package.

11. The method of claim 9 wherein the pressure sensor is comprised of a first diaphragm, the diaphragm for the humidity sensor is a second diaphragm, and the first and second diaphragms are formed on the same layer of the die.

12. The method of claim 9 further comprising using the first value from the pressure sensor to equalize pressure effects on the second value from the humidity sensor.

13. The method of claim 9 wherein the obtaining a first value further comprises obtaining a first value resulting from a change in resistance of one or more piezo resistive transducers included with the pressure sensor and wherein the obtaining second value further comprises obtaining a second value resulting from a change in resistance of another one or more piezo resistive transducers included with the humidity sensor.

14. The method of claim 13 wherein the one or more piezo resistive transducers comprises a plurality of piezo resistive transducers arranged in a first Wheatstone bridge configuration and the another one or more piezo resistive transducers comprises a plurality of piezo resistive transducers arranged in a second Wheatstone bridge configuration and wherein one or more bond pads are used to couple one or more common bias voltages to the first and second Wheatstone bridge.

Assignees

• Bilic Dubravka
• Mcneil Andrew C
• Freescale Semiconductor Inc

Inventors

• Bilic Dubravka
• Mcneil Andrew C

Classifications

• G01L19/14

  Housings {(G01L19/0007, G01L19/0084, G01L19/0092, G01L19/04, G01L19/06 take precedence)} · CPC title

• G01L2019/0053

  Pressure sensors associated with other sensors, e.g. for measuring acceleration, temperature · CPC title

• G01L11/025 Primary

  using a pressure-sensitive optical fibre · CPC title

• G01D1/00

  Measuring arrangements giving results other than momentary value of variable, of general application (G01D3/00 takes precedence; in tariff metering apparatus G01D4/00; transducers not specially adapted for a specific variable G01D5/00) · CPC title

• G01D21/02 Primary

  Measuring two or more variables by means not covered by a single other subclass · CPC title