Position-measuring device and system having a plurality of position-measuring devices
US-9200893-B2 · Dec 1, 2015 · US
Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method
US9103700B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9103700-B2 |
| Application number | US-201113137443-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 16, 2011 |
| Priority date | Feb 21, 2006 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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Abstract
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Position information of a movable body within an XY plane is measured with high accuracy by an encoder system whose measurement values have favorable short-term stability, without being affected by air fluctuations, and also position information of the movable body in a Z-axis direction orthogonal to the XY plane is measured with high accuracy by a surface position measuring system, without being affected by air fluctuations. In this case, since both of the encoder system and the surface position measuring system directly measure the upper surface of the movable body, simple and direct position control of the movable body can be performed.
First claim
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What is claimed is: 1. An exposure apparatus that exposes an object with an energy beam via an optical system, the apparatus comprising: a movable body that has a surface, which faces the optical system and on part of which a mounting area of the object is arranged, and that is movable in a first direction and a second direction within a predetermined plane; a measuring device that has a first detecting system and a second detecting system, the first detecting system having a pl…
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Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
- G01D5/38Primary
Physics · mapped topic
- G03F7/70775Primary
Physics · mapped topic
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Frequently asked questions
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- What does patent US9103700B2 cover?
- Position information of a movable body within an XY plane is measured with high accuracy by an encoder system whose measurement values have favorable short-term stability, without being affected by air fluctuations, and also position information of the movable body in a Z-axis direction orthogonal to the XY plane is measured with high accuracy by a surface position measuring system, without bei…
- Who is the assignee on this patent?
- Shibazaki Yuichi, Nikon Corp
- What technology area does this patent fall under?
- Primary CPC classification G01D5/38. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Aug 11 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).