Triaxial Micro-Electromechanical Gyroscope
US-2017261321-A1 · Sep 14, 2017 · US
US9103675B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9103675-B2 |
| Application number | US-201013503767-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 10, 2010 |
| Priority date | Nov 12, 2009 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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A hemispherical resonator includes a bell fastened to a base. The base carries a main electrode extending facing an annular edge of the bell, and at least one guard electrode adjacent to the main electrodes. An electrically conductive layer covers at least part of the inside surface, the annular edge of the bell, and covers a portion of an outside surface of the bell adjacent to the annular edge thereof.
Opening claim text (preview).
What is claimed is: 1. A hemispherical resonator comprising a bell having an inside surface, an outside surface and an annular edge comprising an annular planar surface extending between the inside surface and the outside surface of the bell, the bell being fastened to a base that carries main electrode extending facing the annular edge of the bell, and at least one guard electrode adjacent to the main electrodes, an electrically conductive layer covering at least part of the insid…
Physics · mapped topic
Physics · mapped topic
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