Semiconductor application installation adapted with a temperature equalization system
US-9625141-B2 · Apr 18, 2017 · US
US9103544B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9103544-B2 |
| Application number | US-201414490243-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 18, 2014 |
| Priority date | Jun 3, 2010 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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A lighting module has an array of light emitters, a heat sink having a first surface, the array of light emitters being mounted to the first surface, a microchannel cooler arranged on a second surface of the heat sink on an opposite side of the heat sink from the first surface, the microchannel cooler arranged to transport a liquid through a channel on the second surface of the heat sink, and a cooling unit thermally coupled to a microchannel cooler and arranged to remove heat from the liquid.
Opening claim text (preview).
The invention claimed is: 1. A lighting system, comprising: an array of light emitters, arranged on a first surface of a substrate; one or more microchannel coolers mounted behind the array on an opposite side of the substrate, the one or more microchannel coolers including an input port to allow a liquid to enter the one or more microchannel coolers and flow through microchannels in the one or more microchannel coolers, and an output port to exhaust the liquid after flowing thr…
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