Pump assembly for a fuel cell system
US-2015349357-A1 · Dec 3, 2015 · US
Check valve diaphragm micropump
US9103336B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9103336-B2 |
| Application number | US-201313906405-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 31, 2013 |
| Priority date | Mar 30, 2006 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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- Title
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Abstract
Official abstract text for this publication.
A micropump device including a first wafer and a second wafer attached to the first wafer. The first and second wafers are configured to define a chamber therebetween having a predetermined volume. A third wafer is attached to the second wafer to define an inlet section and an outlet section in fluid communication with the chamber. At least one of the second and third wafers are formed to define a moveable diaphragm configured to change the predetermined volume of the chamber for pumping a fluid between the inlet section and the outlet section.
First claim
Opening claim text (preview).
The invention claimed is: 1. A method of fabricating micropump device, the method comprising: forming an inlet valve and an outlet valve in device layers of a second wafer and a third wafer; connecting the device layers of the second and third wafers; removing a handle layer of the second wafer; forming an inlet port, an outlet port, and a diaphragm releasing hole in a handle layer of the third wafer; forming a diaphragm from at least one of the device layers of the second…
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Classifications
Cross-Sectional Technologies · mapped topic
Cross-Sectional Technologies · mapped topic
- F04B43/046Primary
Mechanical Engineering · mapped topic
Human Necessities · mapped topic
- F04B43/043Primary
Mechanical Engineering · mapped topic
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Frequently asked questions
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- What does patent US9103336B2 cover?
- A micropump device including a first wafer and a second wafer attached to the first wafer. The first and second wafers are configured to define a chamber therebetween having a predetermined volume. A third wafer is attached to the second wafer to define an inlet section and an outlet section in fluid communication with the chamber. At least one of the second and third wafers are formed to defin…
- Who is the assignee on this patent?
- Kang Jianke, Auner Gregory W, Univ Wayne State
- What technology area does this patent fall under?
- Primary CPC classification F04B43/046. Mapped technology areas include Mechanical Engineering.
- When was this patent published?
- Publication date Tue Aug 11 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).