Robot system
US-2018243902-A1 · Aug 30, 2018 · US
US9102067B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9102067-B2 |
| Application number | US-201213669879-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 6, 2012 |
| Priority date | Nov 8, 2011 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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A sensor element includes a piezoelectric substrate made of a trigonal single crystal and an electrode arranged on the piezoelectric substrate. The substrate surface of the piezoelectric substrate includes an electrical axis of crystal axes. An angle θ formed by the substrate surface and a plane including the electrical axis and an optical axis of the crystal axes is 0°<θ<20°.
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What is claimed is: 1. A sensor element comprising: a piezoelectric substrate made of a trigonal single crystal having crystal axes; a first electrode on a first surface of the piezoelectric substrate; and a second electrode on a second surface, the first and second surfaces being on opposite sides of the piezoelectric substrate, wherein the first surface of the piezoelectric substrate includes an electrical axis, a mechanical axis, and an optical axis of the crystal axes, a…
Physics · mapped topic
Operations & Transport · mapped topic
Physics · mapped topic
Physics · mapped topic
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