Sensor element, force detecting device, robot and sensor device

US9102067B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9102067-B2
Application numberUS-201213669879-A
CountryUS
Kind codeB2
Filing dateNov 6, 2012
Priority dateNov 8, 2011
Publication dateAug 11, 2015
Grant dateAug 11, 2015

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Abstract

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A sensor element includes a piezoelectric substrate made of a trigonal single crystal and an electrode arranged on the piezoelectric substrate. The substrate surface of the piezoelectric substrate includes an electrical axis of crystal axes. An angle θ formed by the substrate surface and a plane including the electrical axis and an optical axis of the crystal axes is 0°<θ<20°.

First claim

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What is claimed is: 1. A sensor element comprising: a piezoelectric substrate made of a trigonal single crystal having crystal axes; a first electrode on a first surface of the piezoelectric substrate; and a second electrode on a second surface, the first and second surfaces being on opposite sides of the piezoelectric substrate, wherein the first surface of the piezoelectric substrate includes an electrical axis, a mechanical axis, and an optical axis of the crystal axes, a…

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What does patent US9102067B2 cover?
A sensor element includes a piezoelectric substrate made of a trigonal single crystal and an electrode arranged on the piezoelectric substrate. The substrate surface of the piezoelectric substrate includes an electrical axis of crystal axes. An angle θ formed by the substrate surface and a plane including the electrical axis and an optical axis of the crystal axes is 0°<θ<20°.
Who is the assignee on this patent?
Seiko Epson Corp
What technology area does this patent fall under?
Primary CPC classification B25J19/028. Mapped technology areas include Operations & Transport.
When was this patent published?
Publication date Tue Aug 11 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).