Substrate treatment method and substrate treatment apparatus
US-2024162032-A1 · May 16, 2024 · US
US9101965B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9101965-B2 |
| Application number | US-200913058997-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 17, 2009 |
| Priority date | Aug 22, 2008 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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Official abstract text for this publication.
A high-pressure washing liquid ejecting washing apparatus comprises a bar-shaped holder; and a plurality of high-pressure washing liquid ejecting nozzles arranged at constant intervals along a longitudinal direction of the bar-shaped holder, the holder being supported at both sides in a longitudinal direction thereof such that the holder is rotatable around its longitudinal axis, the holder being reciprocatingly rotated around the longitudinal axis within a predetermined rotational angle and the ejecting nozzles ejecting a high-pressure washing liquid to a washed surface of an object in a single straight-line shape to wash the object while the object is conveyed at a constant speed with respect to the holder, wherein the holder has a length which is not less than a length across the object and is disposed such that the holder is orthogonal to a direction in which the object is conveyed or is tilted with respect to the direction in which the object is conveyed, when viewed from a normal line direction of the washed surface.
Opening claim text (preview).
The invention claimed is: 1. A high-pressure washing liquid ejecting washing apparatus comprising: a conveyor mechanism that conveys an object in a predetermined direction; a bar-shaped holder; and a plurality of high-pressure washing liquid ejecting nozzles arranged at constant intervals along a longitudinal direction of the bar-shaped holder, the holder being supported at both sides in a longitudinal direction thereof such that the holder is rotatable around its longitudinal…
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