Transducer resistor shunt structure for low-cost probing
US-2015380027-A1 · Dec 31, 2015 · US
US9099643B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9099643-B2 |
| Application number | US-201313777352-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 26, 2013 |
| Priority date | Feb 26, 2013 |
| Publication date | Aug 4, 2015 |
| Grant date | Aug 4, 2015 |
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A magnetoresistive device includes an MR element including a metal layer, and an insulating portion made of magnesium oxide and in contact with the MR element. A method of manufacturing the magnetoresistive device includes the step of removing an unwanted magnesium oxide film that is formed by the magnesium oxide in the process of forming the insulating portion. In this step, the unwanted magnesium oxide film is wet etched by using an etchant containing an aqueous ammonia solution.
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What is claimed is: 1. A method of manufacturing a magnetoresistive device, the magnetoresistive device including: a first electrode and a second electrode located at a distance from each other; a magnetoresistive element including a metal layer and disposed between the first electrode and the second electrode; and an insulating portion in contact with the magnetoresistive element, wherein the magnetoresistive element has a first surface in contact with the first electrode, a seco…
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