High temperature electrode connections

Patent metadata

Field	Value
Publication number	US-9088085-B2
Application number	US-201213667338-A
Country	US
Kind code	B2
Filing date	Nov 2, 2012
Priority date	Sep 21, 2012
Publication date	Jul 21, 2015
Grant date	Jul 21, 2015

Abstract

Embodiments include a high temperature electrode connection assembly for a wafer-processing pedestal. The high temperature electrode connection assembly includes an electrode rod having a cup that mounts to a stud embedded in the pedestal and a plate adapter portion. The assembly also includes a floating plate having an outer surface and an aperture for receiving the electrode rod. The floating plate contacts an inner surface of the pedestal to resist lateral movement of the electrode rods. The assembly also includes an anti-rotation retainer ring that frictionally engages the electrode rod and an anti-rotation post extending from the outer surface of the floating plate. The anti-rotation post limits rotation of the electrode rod with respect to the floating plate.

First claim

What is claimed is:

1. A high temperature electrode connection assembly for a wafer-processing pedestal comprising:
an electrode rod having a plate adapter portion and a cup for mounting to a stud embedded in a pedestal;
a floating plate having an outer surface and an aperture for receiving the electrode rod, the floating plate configured to contact an inner surface of the pedestal to resist lateral movement of the electrode rod;
an anti-rotation retainer ring configured to frictionally engage the electrode rod; and
an anti-rotation post extending from the outer surface of the floating plate, the anti-rotation post configured to limit rotation of the anti-rotational retainer ring such that the anti-rotation post and anti-rotational retainer ring are together configured to limit rotation of the electrode rod with respect to the floating plate.

2. The high temperature electrode connection assembly of claim 1 , further comprising a Belleville washer installed between a shoulder of the stud and the cup, wherein the stud comprises a threaded portion and the cup comprises a complementary threaded portion.

3. The high temperature electrode connection assembly of claim 2 , wherein the Belleville washer between the cup and the stud is substantially flattened.

4. The high temperature electrode connection assembly of claim 2 , wherein the floating plate has one or more index marks for locating the anti-rotation retainer ring, and wherein a first one of the one or more index marks is associated with a preload on the Belleville washer.

5. The high temperature electrode connection assembly of claim 2 , wherein the floating plate has one or more index marks for locating the anti-rotation retainer ring, and wherein a first one of the one or more index marks indicates a predefined number of degrees of release of the Belleville washer from preload.

6. The high temperature electrode connection assembly of claim 1 , wherein the electrode rod is comprised of stainless steel with palladium plating.

7. The high temperature electrode connection assembly of claim 1 , wherein the electrode rod is comprised of stainless steel with rhodium plating.

8. The high temperature electrode connection assembly of claim 1 , wherein the anti-rotation retainer ring is a conventional external snap ring.

9. The high temperature electrode connection assembly of claim 1 , wherein the plate adapter portion has a wrenching feature for rotating the electrode rod from outside the floating plate.

10. The high temperature electrode connection assembly of claim 1 ,
wherein the plate adapter portion has a circumferential groove, and
wherein the anti-rotation retainer ring frictionally engages the electrode rod at the circumferential groove.

11. The high temperature electrode connection assembly of claim 1 , wherein the electrode rod also has a stem between the cup and the plate adapter portion, wherein a ratio of the outer diameters of the cup to the stem is between 2:1 and 5:1.

12. The high temperature electrode connection assembly of claim 1 ,
wherein the plate adapter portion has a shoulder, and
wherein the floating plate is located in a gap between the shoulder of the plate adapter portion and the anti-rotation retainer ring.

13. The high temperature electrode connection assembly of claim 1 , further comprising a clearance gap between the floating plate and an inner surface of the pedestal for relative movement of the floating plate and the pedestal.

14. The high temperature electrode connection assembly of claim 1 , wherein the floating plate is also configured to contact the inner surface of the pedestal to resist rotational movement.

15. The high temperature electrode connection assembly of claim 1 , wherein the floating plate comprises a flat on the outside, wherein the flat is configured to contact an opposing flat on the inside surface of the pedestal to resist rotational movement.

16. A high temperature electrode rod comprising:
a cup for mounting to a stud embedded in a wafer-processing pedestal;
a plate adapter portion;
a stem between the cup and the plate adapter portion;
a circumferential groove in the plate adapter portion, the circumferential groove configured to frictionally engage an anti-rotation retainer ring, wherein the anti-rotational ring is configured to limit rotation of the electrode rod with respect to a floating plate when the anti-rotation retainer ring is in contact with an anti-rotation post, and wherein the floating plate is configured to contact an inner surface of the wafer-processing pedestal to resist lateral movement of the electrode rod; and
a shoulder in the plate adapter portion for limiting axial movement of the floating plate.

17. The high temperature electrode rod of claim 16 , wherein the electrode rod is made of stainless steel with palladium plating.

18. The high temperature electrode rod of claim 16 , wherein the electrode rod is made of stainless steel with rhodium plating.

19. The high temperature electrode rod of claim 16 , wherein the plate adapter portion has a wrenching feature at the plate adapter portion for rotating the electrode rod outside the floating plate.

20. The high temperature electrode rod of claim 16 , wherein a ratio of outer diameters of the cup to the stem is between 2:1 and 5:1.

21. A method of installing a high temperature electrode rod in a high temperature electrode connection assembly, the high temperature electrode rod comprising a cup and a plate adapter portion with a circumferential groove, the method comprising:
mounting the cup of the high temperature electrode rod to a stud embedded in a wafer-processing pedestal;
positioning a floating plate to locate the high temperature electrode rod through an aperture of the floating plate, wherein the floating plate is configured to contact an inner surface of the wafer-processing pedestal to resist lateral movement of the electrode rod;
tightening the high temperature electrode rod to preload a washer between the cup and a shoulder of the stud in the wafer-processing pedestal;
frictionally engaging an anti-rotation retainer ring in the circumferential groove around the high temperature electrode rod;
partially releasing the preload on the washer by loosening the high temperature electrode rod by a predefined number of degrees; and
placing the anti-rotation retainer ring in contact with or in close proximity to an anti-rotation post affixed to the floating plate such that the anti-rotation post and anti-rotational retainer ring are together configured to limit rotation of the high temperature electrode rod with respect to the floating plate.

22. The method of claim 21 , wherein frictionally engaging the anti-rotation retainer ring in the circumferential groove around the electrode rod comprises orienting a feature on the anti-rotation retainer ring to a first index mark on the floating plate.

23. The method of claim 21 , wherein partially releasing the preload on the washer by loosening the electrode rod by the predefined number of degrees comprises rotating the electrode rod such that the anti-rotation retainer ring is in contact with, or in close proximity to, the anti-rotation post.

Assignees

• Novellus Systems Inc

Inventors

• Lind Gary

Classifications

• H10P72/7626 Primary

  characterised by the construction of the shaft · CPC title

• Y10T29/49117

  Conductor or circuit manufacturing · CPC title

• H01J37/32577

  Electrical connecting means · CPC title

• H01R13/2407

  characterized by the resilient means · CPC title

• H01R35/04

  Turnable line connectors with limited rotation angle {with frictional contact members} · CPC title