Method of forming electromechanical transducer film, electromechanical transducer film, electromechanical transducer element, and liquid discharge head

Patent metadata

Field	Value
Publication number	US-9085145-B2
Application number	US-201414243177-A
Country	US
Kind code	B2
Filing date	Apr 2, 2014
Priority date	Jun 9, 2011
Publication date	Jul 21, 2015
Grant date	Jul 21, 2015

Abstract

Disclosed is an electromechanical transducer film forming method including a surface modification process; an application process; and processes of drying, thermally decomposing, and crystallizing sol-gel solution applied to a portion of a surface of a first electrode. An electromechanical transducer film is formed on a desired pattern area on the surface of the first electrode by repeating the above processes. In the application process, each of dots of the sol-gel solution applied by the inkjet method drops onto both a first area inside the desired pattern area and a second area outside the desired pattern area. The first area is a hydrophilic area on the surface of the first electrode, and the second area is a hydrophobic area on the surface of the first electrode. The hydrophilic area and the hydrophobic area have been modified by the surface modification process.

First claim

What is claimed is:

1. An electromechanical transducer element forming method comprising:
forming a first electrode;
forming a second electrode; and
forming an electromechanical transducer film disposed between the first electrode and the second electrode,
wherein the electromechanical transducer film is formed as layers,
wherein the layers are formed by repeatedly performing a method including
a surface modification process of modifying a portion of a surface of a first…

Assignees

• Shimofuku Akira
• Machida Osamu
• Tashiro Ryoh
• Watanabe Yasuhiro
• Ricoh Co Ltd

Inventors

• Shimofuku Akira
• Machida Osamu
• Tashiro Ryoh
• Watanabe Yasuhiro

Classifications

• B41J2/164

  Operations & Transport · mapped topic

• H01L41/047

  Electricity · mapped topic

• B41J2/161 Primary

  Operations & Transport · mapped topic

• B41J2/14201 Primary

  Operations & Transport · mapped topic

• H10N30/87

  Electricity · mapped topic