Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm

Patent metadata

Field	Value
Publication number	US-9076830-B2
Application number	US-201213662946-A
Country	US
Kind code	B2
Filing date	Oct 29, 2012
Priority date	Nov 3, 2011
Publication date	Jul 7, 2015
Grant date	Jul 7, 2015

Abstract

Substrate transport systems and robot apparatus are provided. The systems are adapted to pick or place a substrate at a destination by independently rotating an upper arm, a forearm, and dual wrist members relative to each other and a base. Methods of operating the robot apparatus are provided, as are numerous other aspects.

First claim

The invention claimed is:

1. A robot apparatus, comprising:
a base;
an upper arm adapted to rotate relative to the base about a first rotational axis, the upper arm including a divider;
a forearm coupled to the upper arm at a first position offset from the first rotational axis, the forearm adapted to rotate about a second rotational axis at the first position;
dual wrist members coupled to and adapted for rotation relative to the forearm about a third rotational axis at a s…

Assignees

• Applied Materials Inc

Inventors

• Kremerman Izya
• Hudgens Jeffrey C
• Cox Damon Keith

Classifications

• H10P72/3311

  Electricity · mapped topic

• H10P72/3302 Primary

  Electricity · mapped topic

• B25J9/044

  Operations & Transport · mapped topic

• B25J9/043

  Operations & Transport · mapped topic

• H01L21/67742 Primary

  Electricity · mapped topic