Detection apparatus configured to detect soft X-ray radiation and detection system configured to detect soft X-ray radiation

US9075152B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9075152-B2
Application numberUS-201213565133-A
CountryUS
Kind codeB2
Filing dateAug 2, 2012
Priority dateAug 5, 2011
Publication dateJul 7, 2015
Grant dateJul 7, 2015

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  5. First independent claim

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Abstract

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A detection apparatus configured to detect soft X-ray radiation, includes a conversion unit and a circuit unit disposed on a semiconductor substrate. The conversion unit has a plurality of conversion elements that convert the soft X-ray radiation incident on the semiconductor substrate into electric charge. The circuit unit has an amplifier transistor that amplifies and outputs a signal supplied from the conversion unit. A shielding unit is disposed above the circuit unit. The shielding unit blocks the soft X-ray radiation incident on the circuit unit. Preferably, the soft X-ray shielding coefficient of a material that forms the shielding unit is higher than the soft X-ray shielding coefficient of each of aluminum and copper. Alternatively, a material that forms the shielding unit has an atomic number higher than or equal to 70.

First claim

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What is claimed is: 1. A detection apparatus configured to detect soft X-ray radiation, comprising: a semiconductor substrate including a conversion unit and a circuit unit; and a shielding unit configured to reduce an amount of soft X-ray radiation incident on the semiconductor substrate; wherein the conversion unit includes a plurality of conversion elements disposed in the semiconductor substrate, and the conversion elements convert the soft X-ray radiation incident on the…

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What does patent US9075152B2 cover?
A detection apparatus configured to detect soft X-ray radiation, includes a conversion unit and a circuit unit disposed on a semiconductor substrate. The conversion unit has a plurality of conversion elements that convert the soft X-ray radiation incident on the semiconductor substrate into electric charge. The circuit unit has an amplifier transistor that amplifies and outputs a signal supplie…
Who is the assignee on this patent?
Totsuka Hirofumi, Canon Kk
What technology area does this patent fall under?
Primary CPC classification G01T1/244. Mapped technology areas include Physics.
When was this patent published?
Publication date Tue Jul 07 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).