US9072152B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9072152-B2 |
| Application number | US-201213523446-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 14, 2012 |
| Priority date | Mar 29, 2010 |
| Publication date | Jun 30, 2015 |
| Grant date | Jun 30, 2015 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
An apparatus used with a laser apparatus may include a chamber, a target supply for supplying a target material to a region inside the chamber, a laser beam focusing optical system for focusing a laser beam from the laser apparatus in the region, and an optical system for controlling a beam intensity distribution of the laser beam.
Opening claim text (preview).
What is claimed is: 1. An apparatus comprising: a chamber; a target supply for supplying a target material to a region inside the chamber; a focusing optical system for focusing a laser beam on the region, the laser beams including (1) a pre-pulse laser beam with which the target material is irradiated and (2) a main pulse laser beam with which the target material is irradiated subsequent to the pre-pulse laser beam; a laser apparatus configured to generate the pre-pulse las…
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Related publications grouped by family.
Free tools are coming soon. Tell us what you want to track and we'll notify you.
Answers are generated from the same data shown on this page.