Laser crystallization of thin films on various substrates at low temperatures
US-9211611-B2 · Dec 15, 2015 · US
US9070819B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9070819-B2 |
| Application number | US-201314060985-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 23, 2013 |
| Priority date | Feb 26, 2009 |
| Publication date | Jun 30, 2015 |
| Grant date | Jun 30, 2015 |
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To manufacture a thin film compound solar cell which can improve the adhesive property of electrodes even when being provided with a base material, and which prevents the base material from being separated. A cell main body configured by laminating a plurality of compound semiconductor layers is formed on a substrate. A rear surface electrode 7 is formed on the cell main body, and a rear surface film 8 as the base material is formed on the rear surface electrode 7 . A reinforcing material 9 is attached on the rear surface film 8 . The substrate is separated from the cell main body, and the cell main body is mesa-etched. A surface electrode 13 is formed on a contact layer 3 after the etching. The reinforcing material 9 is separated, and the surface electrode 13 is annealed. The formed thin film compound solar cell is separated into a plurality of solar cell elements.
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What is claimed is: 1. A method for manufacturing a thin film compound solar cell having a cell having a compound semiconductor layer in which at least one PN junction is formed, the method comprising: a process of forming a compound semiconductor layer comprising at least one PN junction on a side of a substrate; a process of forming a rear surface electrode on a surface of the compound semiconductor layer; a process of forming a base material made of a polyimide film by appl…
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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