Pitch changing apparatus, electronic device handling apparatus, and electronic device testing apparatus

Patent metadata

Field	Value
Publication number	US-9069010-B2
Application number	US-201213724461-A
Country	US
Kind code	B2
Filing date	Dec 21, 2012
Priority date	Dec 28, 2011
Publication date	Jun 30, 2015
Grant date	Jun 30, 2015

Abstract

There is provided a pitch changing apparatus which can change a pitch of DUTs when the DUTs are transferred between trays by a shuttle revolving system. The pitch changing apparatus, which changes the pitch of DUTs, includes a plurality of shuttles which hold DUTs, a first guide rail which guides the plurality of shuttles, a second feeder which feeds the shuttles along the first guide rail at a first pitch, a third feeder which includes a plurality of pins receiving the shuttles from the second feeder and moves the pins along the first guide rail at a second pitch, and a controller which controls a feed rate of the second feeder and a receiving rate of the third feeder.

First claim

What is claimed is:

1. A pitch changing apparatus which changes a pitch of electronic devices to be tested, the pitch changing apparatus comprising:
a plurality of holding units which hold the electronic devices;
a track which guides the plurality of holding units;
a first moving unit which feeds the holding units along the track at a first pitch;
a second moving unit which includes a plurality of receiving portions and moves the receiving portions along the track at a second pitch, the receiving portions which receive the holding units from the first moving unit; and
a control unit which controls a feed rate of the first moving unit and a receiving rate of the second moving unit.

2. The pitch changing apparatus according to claim 1 , wherein
an interval between the plurality of holding units is variable on the track.

3. The pitch changing apparatus according to claim 1 , wherein
the control unit makes the feed rate of the first moving unit and the receiving rate of the second moving unit be different from each other so as to change a pitch of the holding units.

4. The pitch changing apparatus according to claim 1 , wherein
the control unit intermittently stops the first moving unit while moves receiving portions by the second moving unit so that the holding units do not convey to at least one among the receiving portions.

5. The pitch changing apparatus according to claim 1 , wherein
the first moving unit moves the rearmost holding unit while making the plurality of holding units come into contact with each other so as to push the foremost holding unit toward the second moving unit.

6. The pitch changing apparatus e according to claim 1 , wherein
the second moving unit includes:
an endless belt on which the plurality of receiving portions are mounted at the second pitch and which is provided in parallel with the track;
at least two pulleys on which the belt is stretched in the shape of a loop; and
a motor which rotationally drives one of the pulleys.

7. The pitch changing apparatus according to claim 1 , wherein
the first pitch is substantially the same as a pitch of holding portions of a customer tray, and
the second pitch is substantially the same as a pitch of inserts of a test tray.

8. The pitch changing apparatus according to claim 1 , further comprising:
a first transfer unit which transfers the electronic devices from a first tray to the holding units with an attitude where terminals of the electronic devices are directed downward or upward; and
a second transfer unit which transfers the electronic devices from the holding units to a second tray with an attitude where the terminals are directed upward or downward.

9. An electronic device handling apparatus which loads electronic devices to be tested onto a test tray, conveys the electronic devices, and presses the electronic devices against a contact portion of a test head in order to test the electronic devices, the electronic device handling apparatus comprising:
at least one of a first pitch changing apparatus according to claim 1 and a second pitch changing apparatus according to claim 1 , the first pitch changing apparatus which transfers untested electronic devices from a customer tray to the test tray, and the second pitch changing apparatus which transfers tested electronic devices from the test tray to the customer tray.

10. An electronic device testing apparatus which tests electronic devices, the electronic device testing apparatus comprising:
a test head;
the electronic device handling apparatus according to claim 9 which presses the electronic devices against a contact portion of the test head; and
a tester which is electrically connected to the test head.

Assignees

• Advantest Corp

Inventors

• Nakajima Haruki

Classifications

• H10P72/50

  for positioning, orientation or alignment · CPC title

• H10P74/00

  Testing or measuring during manufacture or treatment of wafers, substrates or devices · CPC title

• B65G47/24

  orientating the articles · CPC title

• G01R31/2893 Primary

  Handling, conveying or loading, e.g. belts, boats, vacuum fingers (G01R31/2867 takes precedence; handling semiconductor devices or wafers during manufacture or treatment H10P72/00) · CPC title

• G01R1/067 Primary

  Measuring probes · CPC title