Tightly fitted ceramic insulator on large area electrode

Patent metadata

Field	Value
Publication number	US-9068262-B2
Application number	US-201113110184-A
Country	US
Kind code	B2
Filing date	May 18, 2011
Priority date	May 21, 2010
Publication date	Jun 30, 2015
Grant date	Jun 30, 2015

Abstract

Embodiments of the invention generally include shield frame assembly for use with a showerhead assembly, and a showerhead assembly having a shield frame assembly that includes an insulator that tightly fits around the perimeter of a showerhead in a vacuum processing chamber. In one embodiment, a showerhead assembly includes a gas distribution plate and a multi-piece frame assembly that circumscribes a perimeter edge of the gas distribution plate. The multi-piece frame assembly allows for expansion of the gas distribution plate without creating gaps which may lead to arcing. In other embodiments, the insulator is positioned to be have the electric fields concentrated at the perimeter of the gas distribution plate located therein, thereby reducing arcing potential.

First claim

What is claimed is:

1. A multi-piece frame assembly for circumscribing a perimeter edge of a gas distribution plate, comprising:
a first elongated frame member having a hole in a first end and a slot in a second end;
a second elongated frame member having a hole in a first end and a slot in a second end;
a third elongated frame member having a hole in a first end and a slot in a second end; and
a fourth elongated frame member having a hole in a first end and a slot in a second end, wherein the first end of the fourth elongated frame member is configured to allow the second end of the third elongated frame member to freely slide thereacross, and the second end of the fourth elongated frame member is free to slide across the first end of the first elongated frame member.

2. The multi-piece frame assembly of claim 1 , wherein the first elongated frame member comprises:
an inner edge and an outer edge, the inner edge having a concave portion.

3. The multi-piece frame assembly of claim 2 , wherein the inner edge of the first elongated frame member comprises:
a linear surface portion.

4. The multi-piece frame assembly of claim 3 , wherein the linear surface portion of the inner edge is disposed adjacent the slot of the first elongated frame member.

5. The multi-piece frame assembly of claim 1 , wherein the slot of the first elongated frame member has an orientation aligned parallel with a long side of the first elongated frame member.

6. The multi-piece frame assembly of claim 1 , wherein the third elongated frame member comprises:
a body having an inwardly extending lip.

7. The multi-piece frame assembly of claim 1 , wherein the third elongated frame member comprises:
a body having an inwardly extending tapered lip.

8. The multi-piece frame assembly of claim 1 , wherein the third elongated frame member comprises:
a body having an inwardly extending lip, wherein the lip being coplanar with a top surface of the body and extending to an end, the end returning to the body through a curved surface.

9. The multi-piece frame assembly of claim 1 , wherein the third elongated frame member comprises:
a body having a lip and a slot extending from a bottom surface of the body toward a top surface of the body.

10. The multi-piece frame assembly of claim 9 , wherein the slot extends along a length of the third elongated frame member.

11. The multi-piece frame assembly of claim 1 , wherein the frame members are fabricated from ceramic.

12. A showerhead assembly, comprising:
a gas distribution plate; and
a multi-piece frame assembly circumscribing a perimeter edge of the gas distribution plate, the multi-piece frame assembly comprising a first frame member having a free end abutting a fixed end of a second frame member, wherein free end of the first frame member is free to slide across the fixed end of the second frame member.

13. The showerhead assembly of claim 12 , wherein the frame members are fabricated from ceramic.

14. The showerhead assembly of claim 12 , wherein the free end of the first frame member further comprises:
a slot having a guide pin disposed therethrough and securing the free end to the gas distribution plate.

15. The showerhead assembly of claim 12 , wherein the first frame member further comprises:
a fixed end opposite the free end, the fixed end of the first frame member having a hole having a static pin disposed therethrough and securing the fixed end of the first frame member to the gas distribution plate.

16. The showerhead assembly of claim 12 , wherein the showerhead assembly further comprises:
a conducting element disposed in the first frame member of the multi-piece frame assembly and electrically coupled to the gas distribution plate.

Assignees

• Kudela Jozef
• Baek Jonghoon
• White John M
• Tiner Robin
• Anwar Suhail
• Furuta Gaku
• Applied Materials Inc

Inventors

• Kudela Jozef
• Baek Jonghoon
• White John M
• Tiner Robin
• Anwar Suhail
• Furuta Gaku

Classifications

• H01J37/32532

  Electrodes · CPC title

• H01J37/32651

  Shields, e.g. dark space shields, Faraday shields · CPC title

• C23C16/45565 Primary

  Shower nozzles · CPC title

• H01J37/3244

  Gas supply means · CPC title

• Y10T137/6851

  With casing, support, protector or static constructional installations · CPC title