Semiconductor structure manufacturing method and two semiconductor structures
US-11887854-B2 · Jan 30, 2024 · US
Method of manufacturing a sensor device having a porous thin-film metal electrode
US9064800B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9064800-B2 |
| Application number | US-201314132035-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 18, 2013 |
| Priority date | Dec 22, 2012 |
| Publication date | Jun 23, 2015 |
| Grant date | Jun 23, 2015 |
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Abstract
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A method of fabricating a semiconductor sensor device includes providing a substrate, supporting a source region and a drain region with the substrate, forming an insulator layer above the source region and the drain region, and forming a porous metallic gate region above the insulator layer using plasma enhanced atomic layer deposition (PEALD).
First claim
Opening claim text (preview).
What is claimed is: 1. A method of fabricating a semiconductor sensor device comprising: providing a substrate; supporting a source region and a drain region with the substrate; forming an insulator layer above the source region and the drain region; and forming a porous metallic gate region above the insulator layer using plasma enhanced atomic layer deposition (PEALD). 2. The method of claim 1 , wherein forming the porous metallic gate region compris…
Assignees
Inventors
Classifications
- H10D64/013Primary
Electricity · mapped topic
Electricity · mapped topic
- G01N27/4146Primary
Physics · mapped topic
- H01L21/28008Primary
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US9064800B2 cover?
- A method of fabricating a semiconductor sensor device includes providing a substrate, supporting a source region and a drain region with the substrate, forming an insulator layer above the source region and the drain region, and forming a porous metallic gate region above the insulator layer using plasma enhanced atomic layer deposition (PEALD).
- Who is the assignee on this patent?
- Bosch Gmbh Robert
- What technology area does this patent fall under?
- Primary CPC classification H10D64/013. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Jun 23 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).