Superconducting thin film and method of manufacturing superconducting thin film

Patent metadata

Field	Value
Publication number	US-9064620-B2
Application number	US-201213814160-A
Country	US
Kind code	B2
Filing date	Jul 11, 2012
Priority date	Jul 11, 2011
Publication date	Jun 23, 2015
Grant date	Jun 23, 2015

Abstract

Adhesiveness between a metallic substrate and a metal oxide layer is made to increase. A superconducting thin film ( 1 ) includes a metallic substrate ( 10 ), a metallic layer ( 22 ) that is formed on a main surface of the metallic substrate ( 10 ) and includes a metal element capable of being passivated as a main component, a metal oxide layer ( 24 ) that is formed on the metallic layer ( 22 ) and includes the passivated metal element as a main component, and a superconducting layer ( 40 ) that is formed on the metal oxide layer ( 24 ) directly or through an intermediate layer and includes an oxide superconductor as a main component.

First claim

What is claimed is:

1. A superconducting thin film comprising:
a metallic substrate,
a metallic layer formed on a main surface of the metallic substrate, wherein the metallic layer comprises a metal element,
a metal oxide layer formed on the metallic layer, wherein the metal oxide layer comprises the metal element in passivated form, and
a superconducting layer formed on the metal oxide layer directly or through an intermediate layer, wherein the superconducting layer comprises an oxide superconductor.

2. The superconducting thin film according to claim 1 , wherein the metal oxide layer has a formula of A i O i (1<(j/i)≦3), wherein A is at least one selected from the group consisting of Al, Cr, and a rare-earth element.

3. The superconducting thin film according to claim 2 , further comprising:
a composition gradient layer between the metallic layer and the metal oxide layer,
wherein
an oxide of the metal element and the metal element co-exist in the composition gradient layer, and
a ratio of the oxide of the metal element with respect to the metal element in the composition gradient layer continuously increases in a lamination direction from the metallic layer to the metal oxide layer.

4. The superconducting thin film according to claim 3 , wherein at least the main surface of the metallic substrate comprises a Ni-based alloy or an Fe-based alloy.

5. The superconducting thin film according to claim 4 , wherein a thickness of the metal oxide layer is 10 nm to 300 nm.

6. The superconducting thin film according to claim 4 , wherein A comprises Al.

7. The superconducting thin film according to claim 4 , wherein A comprises Cr.

8. The superconducting thin film according to claim 3 , wherein at least the main surface of the metallic substrate comprises a Ni-based alloy.

9. The superconducting thin film according to claim 3 , wherein at least the main surface of the metallic substrate comprises an Fe-based alloy.

10. The superconducting thin film according to claim 1 , further comprising:
a composition gradient layer between the metallic layer and the metal oxide layer, wherein
an oxide of the metal element and the metal element co-exist in the composition gradient layer, and
a ratio of the oxide of the metal element with respect to the metal element in the composition gradient layer continuously increases in a lamination direction from the metallic layer to the metal oxide layer.

11. The superconducting thin film according to claim 1 , wherein a thickness of the metal oxide layer is 10 nm or more.

12. The superconducting thin film according to claim 1 , wherein a thickness of the metal oxide layer is 300 nm or less.

13. The superconducting thin film according to claim 1 , wherein at least the main surface of the metallic substrate comprises a Ni-based alloy or an Fe-based alloy.

14. The superconducting thin film according to claim 1 , wherein a thickness of the metal oxide layer is 10 nm to 300 nm.

15. The superconducting thin film according to claim 1 , wherein at least the main surface of the metallic substrate comprises a Ni-based alloy.

16. The superconducting thin film according to claim 1 , wherein at least the main surface of the metallic substrate comprises an Fe-based alloy.

Assignees

• Hayase Yuko
• Okuno Yoshikazu
• Fukushima Hiroyuki
• Kojima Eiji
• Sakamoto Hisaki
• Furukawa Electric Co Ltd

Inventors

• Hayase Yuko
• Okuno Yoshikazu
• Fukushima Hiroyuki
• Kojima Eiji
• Sakamoto Hisaki

Classifications

• H01L39/2461

  Electricity · mapped topic

• Y10T428/12549

  Adjacent to each other · CPC title

• H01B12/02 Primary

  characterised by their form · CPC title

• Y10T428/12458

  having composition, density, or hardness gradient · CPC title

• H01L39/2454

  Electricity · mapped topic