Discharge-pumped gas laser device
US-9225139-B2 · Dec 29, 2015 · US
US9059554B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9059554-B2 |
| Application number | US-201314049383-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 9, 2013 |
| Priority date | Oct 15, 2012 |
| Publication date | Jun 16, 2015 |
| Grant date | Jun 16, 2015 |
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A discharge-pumped gas laser device may include a laser chamber, a pair of discharge electrodes provided in the laser chamber, a fan with a magnetic bearing being provided in the laser chamber and configured to be capable of circulating a gas in the laser chamber, a housing configured to contain the laser chamber, and a magnetic bearing controller connected to the magnetic bearing electrically, being capable of controlling the magnetic bearing, and provided in the housing separately from the laser chamber.
Opening claim text (preview).
What is claimed is: 1. A discharge-pumped gas laser device, comprising: a laser chamber configured to generate laser light; a pair of discharge electrodes provided in the laser chamber; a fan with a magnetic bearing being provided in the laser chamber and configured to be capable of circulating a gas in the laser chamber; a magnetic bearing controller connected to the magnetic bearing electrically, and being capable of controlling the magnetic bearing; and a laser controll…
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