Group III-V Device with a Selectively Modified Impurity Concentration
US-2015380497-A1 · Dec 31, 2015 · US
Method of manufacturing graphene laminated structure, graphene laminated structure, and electronic device including the graphene laminated structure
US9058985B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9058985-B2 |
| Application number | US-201314070999-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 4, 2013 |
| Priority date | Feb 22, 2013 |
| Publication date | Jun 16, 2015 |
| Grant date | Jun 16, 2015 |
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Abstract
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A method of manufacturing a graphene laminated structure includes plasma-treating a surface of a hexagonal boron nitride sheet using a fluorine-based gas plasma, depositing the hexagonal boron nitride sheet on a graphene sheet, and forming an insulating layer on a surface of the surface-treated hexagonal boron nitride sheet.
First claim
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What is claimed is: 1. A method of manufacturing a graphene laminated structure, the method comprising: plasma-treating a surface of a hexagonal boron nitride sheet using a fluorine-based gas plasma; depositing the hexagonal boron nitride sheet on a graphene sheet; and forming an insulating layer on a surface of the surface-treated hexagonal boron nitride sheet. 2. The method of claim 1 , wherein the plasma-treating includes using at least one gas select…
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Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H10P14/2901Primary
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US9058985B2 cover?
- A method of manufacturing a graphene laminated structure includes plasma-treating a surface of a hexagonal boron nitride sheet using a fluorine-based gas plasma, depositing the hexagonal boron nitride sheet on a graphene sheet, and forming an insulating layer on a surface of the surface-treated hexagonal boron nitride sheet.
- Who is the assignee on this patent?
- Samsung Electronics Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification H10P14/2901. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Jun 16 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).