Airflow-organization testing method for a clean room and system using the same method

Patent metadata

Field	Value
Publication number	US-9057709-B2
Application number	US-201213704363-A
Country	US
Kind code	B2
Filing date	Sep 21, 2012
Priority date	Sep 26, 2011
Publication date	Jun 16, 2015
Grant date	Jun 16, 2015

Abstract

An airflow-organization testing method for a clean room and a system using the same method are disclosed. The airflow-organization testing method for a clean room uses a thermal imaging device to detect a sample gas-flow formed by a sample gas in the clean room, and the sample gas has a temperature difference from ambient air. The airflow-organization testing system for a clean room includes a sample gas supplier and a thermal imaging device, and the thermal imaging device can continuously detect a spatial position of the sample gas and display it on a display, thereby improving detection precision and expanding detection range.

First claim

The invention claimed is:

1. An airflow-organization testing method for a clean room, comprising the steps of:
releasing a sample gas having a temperature that is different from a temperature of an ambient air in the clean room to form a sample gas-flow in the clean room, wherein a density of the sample gas is equivalent to a density of the ambient air; and
obtaining an infrared thermal image of the sample gas-flow.

2. The airflow-organization testing method for a clean room according to claim 1 , wherein the testing method comprises following steps:
releasing the sample gas to form the sample gas-flow along with a clean room airflow;
performing an infrared detection on the sample gas-flow and obtaining an infrared radiation energy distribution graph;
converting the infrared radiation energy distribution graph into the infrared thermal image; and
in accordance with change relationship of space versus time of the infrared thermal image, calculating airflow distribution characteristics in the clean room.

3. The airflow-organization testing method for a clean room according to claim 2 , wherein the infrared detection is performed continuously.

4. The airflow-organization testing method for a clean room according to claim 2 , wherein the testing method further comprises displaying the infrared thermal image.

5. The airflow-organization testing method for a clean room according to claim 2 , wherein the airflow distribution characteristics comprises at least one item of wind speed, three-dimensional wind direction and vortex of a tested area.

6. The airflow-organization testing method for a clean room according to claim 5 , wherein calculating a wind speed of the tested area comprises: taking a distance by which the detected sample gas moves in a unit of time as the wind speed of the tested area; calculating a three-dimensional wind direction comprises: taking a relative positional change of the detected sample gas with respect to a reference point in a unit of time as the three-dimensional wind direction of the tested area.

7. An airflow-organization testing system for a clean room, wherein the system comprises:
a sample gas supplier configured to release a sample gas comprising a temperature that is different from a temperature of ambient air to form a sample gas-flow in the clean room;
a thermal imaging device, which is configured to perform an infrared detection on the sample gas-flow to obtain an infrared radiation energy distribution graph, and convert the infrared radiation energy distribution graph into an infrared thermal image; and
a temperature variation correction unit, which is configured to compensate the infrared thermal image in accordance with temperature variations of the sample gas.

8. The airflow-organization testing system for a clean room according to claim 7 , wherein the sample gas comprises at least one of liquid nitrogen, dry ice, and water vapor.

9. The airflow-organization testing system for a clean room according to claim 7 , wherein the testing system further comprises:
an analysis device, which calculates airflow distribution characteristics in the clean room based on the infrared thermal image.

10. The airflow-organization testing system for a clean room according to claim 9 , wherein the thermal imaging device continuously performs the infrared detection.

11. The airflow-organization testing system for a clean room according to claim 9 , wherein the thermal imaging device displays the infrared thermal image.

12. The airflow-organization testing system for a clean room according to claim 9 , wherein the thermal imaging device comprises:
an infrared detector, which performs the infrared detection on the sample gas-flow, and obtains the infrared radiation energy distribution graph;
a photosensitive unit, which scans the infrared radiation energy distribution graph to obtain electrical signals; and
a video converter, which converts the obtained electrical signals into the infrared thermal image.

13. The airflow-organization testing system for a clean room according to claim 9 , wherein the airflow distribution characteristics comprises at least one item of wind speed, three-dimensional wind direction and vortex of a tested area.

Assignees

• Beijing Boe Optoelectronics
• Beijing Boe Optoelectronics

Inventors

• Li Li
• Jin Wanshi

Classifications

• G01J5/0014 Primary

  for sensing the radiation from gases, flames · CPC title

• G01P5/001

  Full-field flow measurement, e.g. determining flow velocity and direction in a whole region at the same time, flow visualisation · CPC title

• G01P13/02

  Indicating direction only, e.g. by weather vane · CPC title

• G01P5/10

  by measuring thermal variables · CPC title

• G01N21/94 Primary

  Investigating contamination, e.g. dust (G01N21/85 takes precedence) · CPC title