Data collection system for vacuum processing apparatus

Patent metadata

Field	Value
Publication number	US-9054142-B2
Application number	US-201113165656-A
Country	US
Kind code	B2
Filing date	Jun 21, 2011
Priority date	Dec 24, 2008
Publication date	Jun 9, 2015
Grant date	Jun 9, 2015

Abstract

A control device of a transfer module and a process module in a vacuum processing apparatus collects state data from the modules. The control device has a state data set including data on the entire module, updates its own state data in the set of its own state data acquired at acquisition timing and transmits it to a data collection device at transmission timing. A plurality of control devices is connected in a loop or in a chain to the data collection device; a data transmission interval is shorter than a data collection interval, and entire transmission synchronization is set to be less than twice an interval of acquisition timing.

First claim

The invention claimed is:

1. A vacuum processing apparatus comprising:
a transfer module that transfers an object to be processed;
a transfer module control device that repeatedly acquires state data of the transfer module at first intervals and stores the acquired state data of the transfer module therein;
a process module that is connected to the transfer module and performs processing on the object to be processed which is transferred from the transfer module;
a process m…

Assignees

• Zhen Yugui
• Katsumata Kiyohisa
• Sumitani Toshiaki
• Azuma Yoshinori
• Canon Anelva Corp

Inventors

• Zhen Yugui
• Katsumata Kiyohisa
• Sumitani Toshiaki
• Azuma Yoshinori

Classifications

• H10P74/23

  Electricity · mapped topic

• H10P72/3304

  Electricity · mapped topic

• H10P72/0612 Primary

  Electricity · mapped topic

• H01L21/67276 Primary

  Electricity · mapped topic

• H01L21/67745

  Electricity · mapped topic