Device for analising a radiating material using a microprobe

Patent metadata

Field	Value
Publication number	US-9052272-B2
Application number	US-201214356332-A
Country	US
Kind code	B2
Filing date	Nov 15, 2012
Priority date	Nov 15, 2011
Publication date	Jun 9, 2015
Grant date	Jun 9, 2015

Abstract

The invention relates to an analysis device comprising a main enclosure fitted with a secondary enclosure, a microprobe placed inside the main enclosure and fitted with an airlock and with a motion object, and a movable sample support that is movable from the secondary enclosure to the airlock and from the airlock to the motion object. Each of the airlock and the motion object includes a respective guide member for guiding the movable sample support and a respective sensor for detecting the presence of the movable sample support.

First claim

The invention claimed is:

1. A device for analyzing a sample of a material with the help of a microprobe, the device comprising:
a main enclosure containing a secondary enclosure;
a microprobe placed in the main enclosure and fitted with a motion object, the microprobe comprising:
an analysis chamber for receiving the sample
a gun for bombarding the sample placed in the analysis chamber, with a beam, along an axis of the gun,
a column for focusing the beam on the sample, and
Spectrometers arranged to receive X-rays emitted by the sample during interaction between the beam and the material of the sample;
the motion object comprising an XYZ-table serving to move a sample zone that is subjected to bombardment along two orthogonal axes of a plane perpendicular to the axis of the gun and also along that axis;

an airlock ( 26 ) placed in the main enclosure and connected to the microprobe and to the secondary enclosure; and
a movable sample support for supporting the sample, the sample support being movable from the secondary enclosure to the airlock and from the airlock to the motion object;
each of the airlock and the motion object including a respective member for guiding the movable sample support to guide the support while it is being moved, and also a respective sensor for detecting the presence of the movable sample support.

2. A device according to claim 1 , wherein the motion object includes an abutment serving to hold the movable sample support in an analysis position.

3. A device according to claim 1 , including a slidable control bar for moving the movable sample support from the airlock to the motion object and back again.

4. A device according to claim 3 , wherein the movable sample support and the sliding control bar have respective complementary coupling members designed for engaging mutually so as to provide a mechanical connection between the control bar and the movable sample support.

5. A device according to claim 4 , including locking means that enable the coupling members to be mutually separated in a position of the movable sample support on the motion object, referred to as the analysis position, and also in a position of the movable sample support inside the airlock, referred to as the transfer position, while preventing such separation in all other positions of the movable sample support that are intermediate between the analysis position and the transfer position.

6. A device according to claim 1 , including alignment means for aligning the guide member of the airlock and the guide member of the motion object in the event of a power supply failure to the drive motors of the motion object.

7. A device according to claim 6 , wherein, for each movement axis of the motion object, the alignment means comprise a drive member engaged with a wormscrew for driving the motion object along that axis, the drive member being actuatable by means of a manipulator member passing through the wall (13) of the main enclosure.

8. A device according to claim 6 , wherein, for each axis of the motion object, the alignment means comprise a position sensor sensitive to the position of the motion object along that axis, and a display device connected to the sensor to display the position of the motion object along that axis in a manner that is visible from outside the main enclosure.

9. A device according to claim 1 , wherein at least one of the guide members comprises a rail segment on or against which the movable sample support can slip, slide, or roll.

10. A device according to claim 1 , wherein the movable sample support is fitted with skids and/or wheels to facilitate its movement on or along the guide member.

11. A device according to claim 1 , wherein a wall of the airlock is transparent.

12. A device according to claim 1 , wherein the movable sample support includes a visible mark.

13. A device according to claim 1 , including a hollow structure connecting the airlock to the secondary enclosure, within which the movable sample support can move so as to enable the movable sample support to be transferred from the secondary enclosure to the airlock, and back again.

14. A device according to claim 13 , wherein the hollow structure comprises a dustproof covering presenting low mechanical stiffness so as to limit any transmission of vibration from the secondary enclosure to the airlock, the hollow structure possibly being essentially constituted by a corrugated tubular covering made of a plastics material, in particular a covering in the form of a bellows.

15. A device according to claim 1 , wherein the main enclosure is defined by shielded walls.

16. A device according to claim 1 , wherein the secondary enclosure is a glove box maintained at a pressure that is lower than the pressure inside the main enclosure.

Assignees

• Commissariat Energie Atomique
• Commisariat A L En Atomique Et Aux En Alternatives

Inventors

• Lamontagne Jérôme
• Blay Thierry
• Benard Philippe

Classifications

• H01J2237/204

  Means for introducing and/or outputting objects · CPC title

• G01N23/2204 Primary

  Specimen supports therefor; Sample conveying means therefore · CPC title

• H01J2237/184

  Vacuum locks · CPC title

• H01J37/185

  Means for transferring objects between different enclosures of different pressure or atmosphere · CPC title

• H01J37/252

  Tubes for spot-analysing by electron or ion beams; Microanalysers · CPC title