Extension-mode angular velocity sensor

Patent metadata

Field	Value
Publication number	US-9052194-B2
Application number	US-201313966026-A
Country	US
Kind code	B2
Filing date	Aug 13, 2013
Priority date	Sep 11, 2009
Publication date	Jun 9, 2015
Grant date	Jun 9, 2015

Abstract

An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode.

First claim

What is claimed is:

1. An angular rate sensor comprising:
a base;
first, second, third and fourth substantially planar masses disposed substantially in a plane parallel to and above the base, the four substantially planar masses configured to move in an extension mode;
wherein in the extension mode the four substantially planar masses move in the plane simultaneously away from or simultaneously towards a point;
a first Z-axis capacitive sensor coupled to the first mass;
a…

Assignees

• Invensense Inc

Inventors

• Seeger Joseph
• Borovic Bruno

Classifications

• G01C19/574 Primary

  Physics · mapped topic

• G01C19/5719

  Physics · mapped topic

• G01C19/56 Primary

  Physics · mapped topic

• G01C19/5712 Primary

  Physics · mapped topic