Sensor element, sensor device, and electronic apparatus

Patent metadata

Field	Value
Publication number	US-9048418-B2
Application number	US-201313785165-A
Country	US
Kind code	B2
Filing date	Mar 5, 2013
Priority date	Mar 13, 2012
Publication date	Jun 2, 2015
Grant date	Jun 2, 2015

Abstract

A sensor element includes a base part, a detection vibrating arm extended from the base part, and detection parts that are provided on the detection vibrating arm and detect flexural vibration of the detection vibrating arm, the detection parts each have a first electrode layer, a second electrode layer provided at an opposite side to the detection vibrating arm with respect to the first electrode layer, and a piezoelectric layer provided between the first electrode layer and the second electrode layer, and the detection parts have parts provided over boundary parts between the detection vibrating arm and the base part and the parts bend or curve to extend in a direction including a direction component orthogonal to an extension direction of the detection vibrating arm along side surfaces of the detection vibrating arm and the base part.

First claim

What is claimed is:

1. A sensor element comprising:
a base part;
a vibrating arm extended from the base part; and
a detection part that is provided above the vibrating arm and the base part and detects flexural vibration of the vibrating arm, wherein
the detection part has a first electrode layer, a second electrode layer, and a piezoelectric layer provided between the first electrode layer and the second electrode and layer,
the detection part bends or curves to extend in…

Assignees

• Seiko Epson Corp

Inventors

• Asari Tomotaka

Classifications

• G01C19/5607 Primary

  Physics · mapped topic

• G01C19/5621

  Physics · mapped topic

• H01L41/1132 Primary

  Electricity · mapped topic

• H10N30/302 Primary

  Electricity · mapped topic