Deposition source, deposition apparatus, and method of manufacturing organic light-emitting display apparatus

Patent metadata

Field	Value
Publication number	US-9045822-B2
Application number	US-201213593134-A
Country	US
Kind code	B2
Filing date	Aug 23, 2012
Priority date	Feb 1, 2012
Publication date	Jun 2, 2015
Grant date	Jun 2, 2015

Abstract

A deposition source for depositing a deposition material on a substrate, the deposition source including: a nozzle disposed to face the substrate and discharge the deposition material toward the substrate; and a hardening portion disposed to at least one side of the nozzle for immediately hardening the deposition material discharged via the nozzle when the deposition material reaches the substrate. The deposition source being part of a deposition apparatus for manufacturing an organic light-emitting display having improved characteristics of a deposited film and encapsulation characteristics.

First claim

What is claimed is:

1. A method of manufacturing an organic light-emitting display device, the method comprising:
forming a first electrode on a substrate;
forming an intermediate layer comprising an organic emission layer on the first electrode;
forming a second electrode on the intermediate layer;
forming a first inorganic encapsulation layer on the second electrode;
forming a first organic encapsulation layer by disposing an organic material on the first inorganic encapsulation layer through a nozzle of a deposition apparatus discharging the organic material toward the substrate, within a time range after the organic material reaches the substrate and before the organic material permeates into and contaminates the intermediate layer;
performing initial hardening using hardening portions of the deposition apparatus disposed adjacent to the nozzle, the adjacent hardening portions of the deposition apparatus simultaneously hardening the organic material; and
performing completion of the hardening using other hardening portions of the deposition apparatus; and, during the disposing and the hardening, moving the nozzle and the hardening portions relative to the substrate.

2. The method of claim 1 , the hardening of the organic material being performed by emitting ultraviolet (UV) light from the hardening portion.

3. The method of claim 1 , further comprising the intermediate layer having a portion being exposed due to incomplete coverage by the electrodes and the first inorganic encapsulation layer.

4. The method of claim 1 , further comprising forming a second inorganic encapsulation layer on the first organic encapsulation layer.

5. The method of claim 4 , further comprising forming at least one inorganic encapsulation layer and at least one organic encapsulation layer on the second inorganic encapsulation layer.

6. The method of claim 1 , wherein the organic material is an organic material monomer comprising one of acryl, an epoxy-based monomer or a silicon-based monomer.

Assignees

• Kang Tae-Wook
• Yi Jeong-Ho
• Samsung Display Co Ltd

Inventors

• Kang Tae-Wook
• Yi Jeong-Ho

Classifications

• C23C14/243

  Crucibles for source material (C23C14/28, C23C14/30 take precedence) · CPC title

• B05D1/60

  Deposition of organic layers from vapour phase (vapour phase deposition in general C23C14/00, C23C16/00) · CPC title

• B05D3/067

  Curing or cross-linking the coating · CPC title

• C23C14/58 Primary

  After-treatment · CPC title

• C23C14/12 Primary

  Organic material · CPC title