Apparatus and method for electron irradiation scrubbing
US-2024316494-A1 · Sep 26, 2024 · US
Microwave plasma abatement apparatus
US9044707B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9044707-B2 |
| Application number | US-8520506-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 25, 2006 |
| Priority date | Nov 24, 2005 |
| Publication date | Jun 2, 2015 |
| Grant date | Jun 2, 2015 |
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Abstract
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In a method of operating a microwave plasma abatement apparatus comprising a microwave generator, and a gas chamber for receiving microwave energy from the microwave generator and within which a plasma is generated using the microwave energy, the amount of microwave energy that is not absorbed within the gas chamber is monitored, and the power of the microwave energy generated by the microwave generator is adjusted in dependence on the monitored microwave energy.
First claim
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We claim: 1. A microwave plasma abatement apparatus comprising: a microwave generator; a gas chamber for receiving microwave energy from the microwave generator and within which a plasma is generated using the microwave energy, wherein the gas chamber comprises a gas inlet for receiving a gas stream and a gas outlet; a waveguide connected between the microwave generator and the gas chamber, wherein the waveguide includes a waveguide isolator, and wherein the waveguide isolator…
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Operations & Transport · mapped topic
Operations & Transport · mapped topic
- B01D53/32Primary
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
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- What does patent US9044707B2 cover?
- In a method of operating a microwave plasma abatement apparatus comprising a microwave generator, and a gas chamber for receiving microwave energy from the microwave generator and within which a plasma is generated using the microwave energy, the amount of microwave energy that is not absorbed within the gas chamber is monitored, and the power of the microwave energy generated by the microwave …
- Who is the assignee on this patent?
- Radoiu Marilena, Smith James Robert, Seeley Andrew James, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification B01D53/32. Mapped technology areas include Operations & Transport.
- When was this patent published?
- Publication date Tue Jun 02 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).