Resonator for thermo optic device

Patent metadata

Field	Value
Publication number	US-9042697-B2
Application number	US-201213483542-A
Country	US
Kind code	B2
Filing date	May 30, 2012
Priority date	Aug 29, 2002
Publication date	May 26, 2015
Grant date	May 26, 2015

Abstract

A resonator for thermo optic devices is formed in the same process steps as a waveguide and is formed in a depression of a lower cladding while the waveguide is formed on a surface of the lower cladding. Since upper surfaces of the resonator and waveguide are substantially coplanar, the aspect ratio, as between the waveguide and resonator in an area where the waveguide and resonator front one another, decreases thereby increasing the bandwidth of the resonator. The depression is formed by photomasking and etching the lower cladding before forming the resonator and waveguide. Pluralities of resonators are also taught that are formed in a plurality of depressions of the lower cladding. To decrease resonator bandwidth, waveguide(s) are formed in the depression(s) of the lower cladding while the resonator is formed on the surface. Thermo optic devices formed with these resonators are also taught.

First claim

What is claimed is:

1. A thermo-optic device, comprising:
a first cladding with a surface and at least one depression in the surface;
features on the first cladding, the features including a first waveguide extending from the first cladding to a top waveguide surface, a second waveguide and a resonator extending up from the first cladding to the top waveguide surface, the resonator disposed between the first waveguide and the second waveguide, at least one of the features positioned in the at least one depression of the first cladding to provide a desired waveguide/resonator aspect ratio for a desired bandwidth;
a second cladding over and around the first waveguide, the second waveguide and the at least one resonator, wherein the resonator is a first resonator in a first depression; and
a second resonator in a second depression in the first cladding.

2. The thermo-optic device of claim 1 , wherein a top resonator surface is substantially coplanar with a top waveguide surface.

3. The thermo-optic device of claim 1 , further including a substrate, the cladding being on the substrate.

4. The thermo-optic device of claim 1 , wherein the at least one depression is a trench.

5. The thermo-optic device of claim 1 , wherein at least one of the waveguide and the resonator is formed of silicon oxide.

6. The thermo-optic device of claim 1 , wherein at least one of the waveguide and the resonator is formed of silicon oxynitride.

7. The thermo-optic device of claim 1 , wherein the resonator and the first cladding are formed of materials of different indices of refraction.

8. The thermo-optic device of claim 1 , wherein the second cladding and the first cladding are formed from a common materials.

9. A system for connection to a fiber optic line, comprising:
a package coupleable with the fiber optic line; and
a thermo-optic device, the device disposed in the package and including:
a first cladding with a surface and at least one depression in the surface;
features on the first cladding, the features including a first waveguide extending from the first cladding to a top waveguide surface, a second waveguide and a resonator extending up from the first cladding to the top waveguide surface, the resonator disposed between the first waveguide and the second waveguide, at least one of the features positioned in the at least one depression of the first cladding to provide a desired waveguide/resonator aspect ratio for a desired bandwidth;
a second cladding over and around the first waveguide, the second waveguide and the at least one resonator, wherein the resonator is a first resonator in a first depression; and
a second resonator in a second depression in the first cladding.

10. The system of claim 9 , wherein the at least one depression is filled with a resonator deposit.

11. The system of claim 9 , wherein the top waveguide surface of at least one of the first and second waveguides is substantially coplanar with a surface of the resonator.

12. The system of claim 9 , wherein the package further includes at least one input fiber optic port and at least one output fiber optic port.

13. The system of claim 12 , wherein the device includes at least one input connector coupled to the at least one input fiber optic port and at least one output connector coupled to the at least one output fiber optic port.

14. A package, comprising:
a thermo-optic device comprising
a first cladding with a surface and at least one depression in the surface;
features on the first cladding, the features including a first waveguide extending from the first cladding to a top waveguide surface, a second waveguide and a resonator extending up from the first cladding to the top waveguide surface, the resonator disposed between the first waveguide and the second waveguide, at least one of the features positioned in the at least one depression of the first cladding to provide a desired waveguide/resonator aspect ratio for a desired bandwidth;
a second cladding over and around the first waveguide, the second waveguide and the at least one resonator, wherein the resonator is a first resonator in a first depression; and
a second resonator in a second depression in the first cladding.

15. The package of claim 14 , wherein the a top resonator surface of the resonator and the top waveguide surface are substantially coplanar.

16. The package of claim 14 , wherein the top waveguide surface of at least one of the first and second waveguides is substantially coplanar with a top resonator surface of the resonator.

17. The package of claim 14 , further including an input connector and an output connector coupled with the device.

18. The package of claim 17 , further including an input fiber optic port coupled to the input connector and an output fiber optic port coupled to the output connector.

19. The package of claim 17 , wherein the input connector is a single input connector, and the output connector is one of a plurality of output connectors.

Assignees

• Sandhu Gurtej Singh
• Blalock Guy T
• Rhodes Howard E
• Micron Technology Inc

Inventors

• Sandhu Gurtej Singh
• Blalock Guy T
• Rhodes Howard E

Classifications

• G02F1/011

  in optical waveguides, not otherwise provided for in this subclass · CPC title

• G02F2203/15

  involving resonance effects, e.g. resonantly enhanced interaction · CPC title

• G02F1/0147

  based on thermo-optic effects (G02F1/132 takes precedence) · CPC title

• G02B6/132 Primary

  by deposition of thin films · CPC title

• G02B6/12007

  forming wavelength selective elements, e.g. multiplexer, demultiplexer · CPC title