Multiple bond via arrays of different wire heights on a same substrate
US-2015380377-A1 · Dec 31, 2015 · US
US9040355B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9040355-B2 |
| Application number | US-201213546902-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 11, 2012 |
| Priority date | Jul 11, 2012 |
| Publication date | May 26, 2015 |
| Grant date | May 26, 2015 |
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Official abstract text for this publication.
A method ( 70 ) of forming sensor packages ( 20 ) entails providing a sensor wafer ( 74 ) having sensors ( 30 ) formed on a side ( 26 ) positioned within areas ( 34 ) delineated by bonding perimeters ( 36 ), and providing a controller wafer ( 82 ) having control circuitry ( 42 ) at one side ( 38 ) and bonding perimeters ( 46 ) on an opposing side ( 40 ). The bonding perimeters ( 46 ) of the controller wafer ( 82 ) are bonded to corresponding bonding perimeters ( 36 ) of the sensor wafer ( 74 ) to form a stacked wafer structure ( 48 ) in which the control circuitry ( 42 ) faces outwardly. The controller wafer ( 82 ) is sawn to reveal bond pads ( 32 ) on the sensor wafer ( 74 ) which are wire bonded to corresponding bond pads ( 44 ) formed on the same side ( 38 ) of the wafer ( 82 ) as the control circuitry ( 42 ). The structure ( 48 ) is encapsulated in packaging material ( 62 ) and is singulated to produce the sensor packages ( 20 ).
Opening claim text (preview).
What is claimed is: 1. A method of forming sensor packages comprising: providing a sensor wafer having a first side and a second side opposite said first side, said first side including sensors positioned within areas on said first side delineated by first bonding perimeters, and said sensor wafer including first bond pads formed on said first side outside of said areas delineated by said first bonding perimeters; providing a controller wafer having a third side and a fourth sid…
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