Electronic element, variable capacitor, micro switch, method for driving micro switch, and MEMS type electronic element

Patent metadata

Field	Value
Publication number	US-9036327-B2
Application number	US-201313864430-A
Country	US
Kind code	B2
Filing date	Apr 17, 2013
Priority date	Sep 27, 2006
Publication date	May 19, 2015
Grant date	May 19, 2015

Abstract

An electronic element includes a fixed portion, and a movable portion which is movable with respect to the fixed portion and which is provided to generate a spring force to make restoration to a predetermined position. The fixed portion is provided with a first driving electrode and a first signal electrode. The movable portion is provided with a second driving electrode and a second signal electrode. An electrostatic force is generated between the first driving electrode and the second driving electrode by a voltage applied therebetween so that the electrostatic force resists against the spring force; and the first and second driving electrodes and the first and second signal electrodes are arranged so that the electrostatic force is generated in a direction in which a spacing distance between the first and second signal electrodes is widened.

First claim

What is claimed is:

1. An optical element comprising:
a substrate,
a fixed portion,
a movable portion,
a first driving electrode,
a second driving electrode, and
a first optical member arranged on the movable portion;
wherein the fixed portion is arranged on the substrate so that the fixed portion is separated from the substrate by a predetermined spacing distance,
the movable portion is movable with respect to the fixed portion and is provided to generate a spring force to cause restoration of the movable portion to a predetermined position,
an electrostatic force is generated between the first driving electrode and the second driving electrode by a voltage applied between the first driving electrode and the second driving electrode so that the electrostatic force resists against the spring force, and
the movable portion continues to be urged by the spring force to contact with the fixed portion during a period in which the voltage is not applied between the first driving electrode and the second driving electrode, and
the movable portion has a movable plate and plate spring portions arranged on both sides of the movable plate in a predetermined direction, the plate spring portions each having the second driving electrode thereon, and
the second driving electrode is constructed to be warped when the electrostatic force is generated between the first driving electrode and the second driving electrode.

2. The optical element according to claim 1 , wherein the movable portion is supported by the spring portions so that the movable portion is positioned between the substrate and the fixed portion.

3. The optical element according to claim 1 , wherein the first optical member is a lens.

4. The optical element according to claim 3 , further comprising a second optical member arranged on the fixed portion, wherein the first optical member and the second optical member constitute a focusing mechanism.

5. The optical element according to claim 1 , wherein the first optical member is a mirror.

6. The optical element according to claim 5 , further comprising a second optical member arranged on the fixed portion, wherein the first optical member and the second optical member constitute an interferometer.

7. The optical element according to claim 1 , further comprising a second optical member arranged on the fixed portion.

8. The optical element according to claim 7 , wherein the second optical member is a lens.

9. The optical element according to claim 7 , wherein the second optical member is a mirror.

Assignees

• Nikon Corp

Inventors

• Konishi Hiroshi
• Suzuki Junji

Classifications

• H10W20/496

  Capacitor integral with wiring layers · CPC title

• H10D84/215

  of only varactors · CPC title

• H10D84/00

  Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers · CPC title

• H10D84/038

  using silicon technology, e.g. SiGe · CPC title

• G02B26/08 Primary

  for controlling the direction of light (in light guides G02B6/35) · CPC title