Position detection apparatus, position detection method, imprint apparatus, and method of manufacturing article
US-2015377614-A1 · Dec 31, 2015 · US
US9036158B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9036158-B2 |
| Application number | US-201113204719-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 8, 2011 |
| Priority date | Aug 11, 2010 |
| Publication date | May 19, 2015 |
| Grant date | May 19, 2015 |
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A pattern projector, comprising a light source, configured to emit a beam of light. A transparent substrate, which has a pair of mutually-opposed planar surfaces is configured to receive and propagate the beam within the substrate by total internal reflection between the planar surfaces. The transparent substrate comprises a diffractive structure that is formed on one of the planar surfaces and is configured to direct at least a part of the beam to propagate out of the substrate in a direction that is angled away from the surface and to create a pattern comprising multiple interleaved light and dark areas.
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The invention claimed is: 1. A pattern projector, comprising: a planar carrier; a light source, which is mounted on a surface of the planar carrier and is configured to emit a beam of light in a direction parallel to the surface; and a transparent substrate, which has a pair of first and second mutually-opposed planar surfaces and has mutually-opposed first and second edges extending between the planar surfaces, wherein the transparent substrate is mounted on the planar carrier along the first planar surface and is configured to receive the beam through the first edge and propagate the beam within the substrate by total internal reflection between the planar surfaces, and which comprises a diffractive structure that is formed on the second planar surface and is configured to direct at least a part of the beam to propagate out of the substrate in a direction that is angled away from the second planar surface and to create a pattern comprising multiple interleaved light and dark areas. 2. The pattern projector of claim 1 , wherein the pattern comprises a quasi-random distribution of light spots. 3. The projector of claim 1 , wherein the diffractive structure on one of the planar surfaces creates a diffraction pattern comprising multiple interleaved light and dark areas in far-field. 4. The projector of claim 1 , wherein light exiting the substrate through the diffractive structure is projected directly onto a target without passing through additional optical elements. 5. The projector of claim 1 , wherein the diffractive structure comprises both diffractive sub-areas and non-diffractive sub-areas arranged to define a projected pattern in the light beam exiting the substrate. 6. The projector of claim 5 , comprising a projection lens which directs the light beam exiting the substrate toward a target. 7. The projector of claim 1 , comprising at least one diffractive element through which light exiting the substrate through the diffractive structure passes on its way to the object. 8. The projector of claim 1 , wherein the light beam from the light source is directed into the substrate without passing through a coupling lens. 9. The projector of claim 1 , comprising a coupling lens adapted to deflect the light beam on its entrance into the substrate, so that the light enters the substrate at an angle suitable for the total internal reflection. 10. The projector of claim 9 , wherein distortion of the carrier due to temperature changes compensates for distortions of the coupling lens due to temperature changes. 11. The projector of claim 1 , wherein the second edge of the transparent substrate is treated so as to prevent back-reflection from the second edge of the beam propagating within the substrate. 12. A method of pattern projection, comprising: directing a light beam from a light source mounted on a surface of a planar carrier into a transparent substrate, which has a pair of first and second mutually-opposed planar surfaces and has mutually-opposed first and second edges extending between the planar surfaces, wherein the transparent substrate is mounted on the planar carrier along the first planar surface, and wherein the light beam is emitted from the light source in a direction parallel to the surface of the planar carrier and enters the transparent substrate through the first edge; propagating the light beam through the substrate by total internal reflection between the planar surfaces to a diffractive structure on the second planar surface of the substrate; and emitting at least a part of the light beam to propagate out of the substrate through the diffractive structure so as to project a pattern comprising multiple interleaved light and dark areas. 13. The method of claim 12 , wherein emitting the light beam comprises emitting through a diffractive structure which defines a pattern comprising multiple interleaved light and dark areas in a far-field. 14. The method of claim 12 , wherein emitting the light beam comprises emitting through a diffractive structure including diffractive areas and plain areas. 15. A three dimensional mapping system, comprising: a planar carrier; a light source which is mounted on a surface of the planar carrier and emits a light beam in a direction parallel to the surface for illuminating an object; a transparent substrate which has a pair of first and second mutually-opposed planar surfaces and has mutually-opposed first and second edges extending between the planar surfaces, wherein the transparent substrate is mounted on the planar carrier along the first planar surface and comprises a diffractive structure on the second planar surface, the transparent substrate being configured to receive the light beam from the light source through the first edge, and to direct the light beam within the substrate, by total internal reflection between the planar surfaces, to the diffractive structure from which the light beam is directed to the object; a light detection unit configured to collect light from the light source reflected from the object; and a processor configured to process light collected by the light detection unit for three-dimensional mapping of the object, responsive to patterns of the light projected on the object from the diffractive structure. 16. The system of claim 15 , wherein the diffractive structure is designed to project a quasi-random distribution of light spots. 17. The system of claim 15 , wherein the diffractive structure comprises both diffractive sub-areas and non-diffractive sub-areas arranged to define an image in the light beam exiting the substrate through the diffractive structure. 18. The system of claim 15 , comprising a diffractive element through which the light emitted from the diffractive structure defined on the transparent substrate passes on its way to the object. 19. The system of claim 15 , comprising at least one mirror which directs the light beam from the source to the transparent substrate. 20. The system of claim 15 , wherein the second edge of the transparent substrate is treated to prevent reflection of light received from the diffractive structure from returning to the diffractive structure. 21. A method of three dimensional mapping, comprising: directing a light beam from a light source mounted on a surface of a planar carrier into a transparent substrate, which has a pair of first and second mutually-opposed planar surfaces and has mutually-opposed first and second edges extending between the planar surfaces, wherein the transparent substrate is mounted on the planar carrier along the first planar surface, and wherein the light beam is emitted from the light source in a direction parallel to the surface of the planar carrier and enters the transparent substrate through the first edge, so that the light beam propagates through the substrate by total internal reflection between the planar surfaces to a diffractive structure on the second planar surface of the substrate; directing light exiting the transparent substrate from the diffractive structure towards an object; collecting light reflected from the object; and determining a three dimensional mapping of the object responsive to the collected light. 22. The method of claim 21 , wherein the diffractive structure projects a quasi-random distribution of light spots. 23. The method of claim 21 , wherein the diffractive structure comprises both diffractive sub-areas and non-diffractive sub-areas arranged to define an
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