Method of in-process intralayer yield detection, interlayer shunt detection and correction

US9035673B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9035673-B2
Application numberUS-69301910-A
CountryUS
Kind codeB2
Filing dateJan 25, 2010
Priority dateJan 25, 2010
Publication dateMay 19, 2015
Grant dateMay 19, 2015

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Abstract

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A system and method for in-process yield evaluation and correction in an array type of device are provided. The system and method include measuring electrical resistance between individual GATE lines, DATA lines, a DATA bus I/O pad, and a GATE bus I/O pad; and analyzing the measured electrical resistance to identify at least one of the following: GATE line open defects, GATE line bridge defects, DATA line open defects, DATA line bridge defects, and interlayer shunt defects.

First claim

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What is claimed is: 1. A method for in-process yield evaluation in an array type of device, comprising: measuring an electrical property between individual GATE lines, DATA lines, a DATA bus I/O pad, and a GATE bus I/O pad; and analyzing the measured electrical property to identify interlayer shunt defects; wherein interlayer shunt defects are identified through a process including: measuring electrical resistance between individual DATA lines and the GATE bus I/O…

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What does patent US9035673B2 cover?
A system and method for in-process yield evaluation and correction in an array type of device are provided. The system and method include measuring electrical resistance between individual GATE lines, DATA lines, a DATA bus I/O pad, and a GATE bus I/O pad; and analyzing the measured electrical resistance to identify at least one of the following: GATE line open defects, GATE line bridge defects…
Who is the assignee on this patent?
Young Michael Yu Tak, Limb Scott Jong Ho, Wong William S, and 2 more
What technology area does this patent fall under?
Primary CPC classification G11C29/025. Mapped technology areas include Physics.
When was this patent published?
Publication date Tue May 19 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).