Methods of forming semiconductor devices
US-2024387699-A1 · Nov 21, 2024 · US
Method for manufacturing a semiconductor substrate
US9035474B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9035474-B2 |
| Application number | US-79351510-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 3, 2010 |
| Priority date | Apr 6, 2010 |
| Publication date | May 19, 2015 |
| Grant date | May 19, 2015 |
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Abstract
Official abstract text for this publication.
The invention relates to a method for manufacturing a semiconductor substrate, in particular, a semiconductor-on-insulator substrate by providing a donor substrate and a handle substrate, forming a pattern of one or more doped regions typically inside the handle substrate, and then attaching such as by molecular bonding the donor substrate and the handle substrate to obtain a donor-handle compound.
First claim
Opening claim text (preview).
What is claimed is: 1. A method for manufacturing a semiconductor substrate, comprising: providing a donor substrate and a semiconductor handle substrate; implanting ions into the semiconductor handle substrate and forming one or more alignment marks buried completely inside the semiconductor handle substrate by the implantation of the ions, the one or more alignment marks being configured to be detectable using electromagnetic radiation in the infrared region of the electromagn…
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Classifications
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H10P90/1916Primary
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9035474B2 cover?
- The invention relates to a method for manufacturing a semiconductor substrate, in particular, a semiconductor-on-insulator substrate by providing a donor substrate and a handle substrate, forming a pattern of one or more doped regions typically inside the handle substrate, and then attaching such as by molecular bonding the donor substrate and the handle substrate to obtain a donor-handle compo…
- Who is the assignee on this patent?
- Mazure Carlos, Ferrant Richard, Bourdelle Konstantin, and 2 more
- What technology area does this patent fall under?
- Primary CPC classification H10P90/1916. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue May 19 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).