Electronic component package and method for manufacturing electronic component package
US-2024090133-A1 · Mar 14, 2024 · US
Physical quantity detection device and physical quantity detector
US9035401B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9035401-B2 |
| Application number | US-201414247349-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 8, 2014 |
| Priority date | Apr 25, 2013 |
| Publication date | May 19, 2015 |
| Grant date | May 19, 2015 |
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Abstract
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A physical quantity detection device includes a glass substrate, a substrate including a physical quantity detection part and bonded to a first surface of the glass substrate with a hermetically sealed space being formed inside the substrate, and a function membrane formed on a second surface of the glass substrate opposite to the first surface. The function membrane prevents the second surface of the glass substrate from coming into contact with moisture in the atmosphere.
First claim
Opening claim text (preview).
What is claimed is: 1. A physical quantity detection device, comprising: a glass substrate; a substrate including a physical quantity detection part, the substrate being bonded to a first surface of the glass substrate with a hermetically sealed space being formed inside the substrate; and a function membrane formed on a second surface of the glass substrate opposite to the first surface, the function membrane preventing the second surface of the glass substrate from coming in…
Assignees
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Classifications
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H10W76/60Primary
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US9035401B2 cover?
- A physical quantity detection device includes a glass substrate, a substrate including a physical quantity detection part and bonded to a first surface of the glass substrate with a hermetically sealed space being formed inside the substrate, and a function membrane formed on a second surface of the glass substrate opposite to the first surface. The function membrane prevents the second surface…
- Who is the assignee on this patent?
- Nakane Taketomo, Haseko Yoshihiro, Shimazu Yuki, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification H10W76/60. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue May 19 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).