Thermal treatment device
US-2017254592-A1 · Sep 7, 2017 · US
US9033705B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9033705-B2 |
| Application number | US-44835608-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 6, 2008 |
| Priority date | Aug 10, 2007 |
| Publication date | May 19, 2015 |
| Grant date | May 19, 2015 |
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A hydrogen vacuum furnace ( 100 ) is provided with a process chamber ( 1 ) wherein a subject ( 10 ) to be heated is stored; a heating chamber ( 2 ) wherein a heater lamp ( 25 ) is stored; and a crystal board ( 3 ) for separating the subject ( 10 ) and the heater lamp ( 25 ) one from the other. In the hydrogen vacuum furnace ( 100 ), the subject ( 10 ) is heated by a radiant ray applied from the heater lamp ( 25 ). The process chamber ( 1 ) and the heating chamber ( 2 ) are provided with gas feed ports ( 11, 21 ) and exhaust ports ( 12, 22 ), respectively, for feeding and exhausting a gas. When the subject ( 10 ) is being heated, atmospheric pressure in each chamber is adjusted so that the heating chamber ( 2 ) is under positive pressure to the process chamber ( 1 ) by feeding or exhausting the gas.
Opening claim text (preview).
The invention claimed is: 1. A heating furnace for heating a subject to be heated by radiation, comprising: a first chamber in which the subject will be placed, the first chamber including a first gas feed port configured to feed a first gas and a first gas exhaust port configured to exhaust the first gas; a second chamber placed adjacent to the first chamber and housing a heating source, and including a second gas feed port configured to feed a second gas and a second gas exhau…
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