Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems with web extending from hub

Patent metadata

Field	Value
Publication number	US-9033644-B2
Application number	US-201313923741-A
Country	US
Kind code	B2
Filing date	Jun 21, 2013
Priority date	Jul 5, 2012
Publication date	May 19, 2015
Grant date	May 19, 2015

Abstract

Boom drive apparatus for substrate transport systems and methods are described. The boom drive apparatus is adapted to drive one or more multi-arm robots rotationally mounted to the boom to efficiently put or pick substrates. The boom drive apparatus has a boom including a hub, a web, a first pilot above the web, and a second pilot below the web, a first driving member rotationally mounted to the first pilot, a second driving member rotationally mounted to the second pilot, a first driven member rotationally mounted to the boom above the a web, a second driven member rotationally mounted to the boom below the a web, and a first and second transmission members coupling the driving members to driven members located outboard on the boom. Numerous other aspects are provided.

First claim

The invention claimed is:

1. A boom drive apparatus, comprising:
a boom including a hub, a web extending from the hub, the hub having a first pilot extending in a first direction above the web, and a second pilot extending in a second direction below the web, upper walls extending above the web and lower walls extending below the web, an upper cover coupled to the upper walls, and a lower cover coupled to the lower walls;
a first driving member rotationally mounted to the first pilot;
a second driving member rotationally mounted to the second pilot;
a first driven member rotationally mounted to the boom above the web at a first outboard location;
a second driven member rotationally mounted to the boom below the web at a second outboard location;
a first transmission member coupling the first driving member to the first driven member above the web; and
a second transmission member coupling the second driving member to the second driven member below the web.

2. The boom drive apparatus of claim 1 , comprising first and second forearm driving pulleys non-rotationally coupled to the web at a first outboard end.

3. The boom drive apparatus of claim 1 , comprising an inner shaft coupling the second driven member to the second upper arm, and an outer shaft received over the inner shaft and coupling to a first forearm driving pulley and a second forearm driving pulley.

4. The boom drive apparatus of claim 1 , comprising a boom pilot shaft extending from the hub and adapted to be driven by a boom drive motor.

5. The boom drive apparatus of claim 1 , comprising a first driving member pilot shaft extending from the first driving member and adapted to be driven by a first drive motor.

6. The boom drive apparatus of claim 1 , comprising a second driving member pilot shaft extending from the second driving member and adapted to be driven by a second drive motor.

7. The boom drive apparatus of claim 1 , wherein the web is approximately vertically centrally located in the boom.

8. An electronic device processing system, comprising:
a transfer chamber;
a robot apparatus received in the transfer chamber and adapted to transport multiple substrates, the robot apparatus having a boom drive apparatus having
a boom adapted to be rotated about a primary rotational axis, the boom including a hub, a web extending radially from the hub, the hub having a first pilot extending in a first direction above the web, and a second pilot extending in a second direction below the web,
a first driving member rotationally mounted to the first pilot,
a second driving member rotationally mounted to the second pilot,
a first driven member rotationally mounted to the boom at an outboard end above the web,
a second driven member rotationally mounted to the boom at an outboard end below the web,
a first transmission member coupling the first driving member to the first driven member above the web, and
a second transmission member coupling the second driving member to the second driven member below the web;

a first multi-arm robot rotationally coupled to the boom at the first outboard end, the first multi-arm robot having a first upper arm coupled to the first driven member, a first forearm, a first wrist member, and a first end effector adapted to support a first substrate; and
a second multi-arm robot rotationally coupled to the boom at the first outboard end, the second multi-arm robot having a second upper arm coupled to the second driven member, a second forearm, a second wrist member, and a second end effector adapted to support a second substrate.

9. A method of transporting substrates within an electronic device processing system, comprising:
providing a boom drive apparatus having a boom including a hub, a web extending radially from the hub, the hub having a first pilot extending in a first direction above the web, and a second pilot extending in a second direction below the web, a first driving member rotationally mounted to the first pilot, a second driving member rotationally mounted to the second pilot, a first driven member rotationally mounted to the boom at a first outboard end above the web, a second driven member rotationally mounted to the boom at a first outboard end below the web, a first transmission member coupling the first driving member to the first driven member above the web, and a second transmission member coupling the second driving member to the second driven member below the web;
coupling a first multi-arm robot to the first outboard end of the boom;
coupling a second multi-arm robot to the first outboard end of the boom;
driving the first multi-arm robot by driving the first driving member; and
driving the second multi-arm robot by driving the second driving member.

10. A multi-arm robot apparatus, comprising:
a boom drive apparatus having
a boom adapted to be rotated about a primary rotational axis, the boom including a hub, a web extending radially from the hub, the hub having a first pilot extending in a first direction above the web, and a second pilot extending in a second direction below the web,
a first driving member rotationally mounted to the first pilot,
a second driving member rotationally mounted to the second pilot,
a first driven member rotationally mounted to the boom at a first outboard end above the web,
a second driven member rotationally mounted to the boom at the first outboard end below the web,
a first transmission member coupling the first driving member to the first driven member above the web, and
a second transmission member coupling the second driving member to the second driven member below the web;

a first multi-arm robot rotationally coupled to the boom at the first outboard end, the first multi-arm robot having a first upper arm coupled to the first driven member, a first forearm, a first wrist member, and a first end effector adapted to support a first substrate; and
a second multi-arm robot rotationally coupled to the boom at the first outboard end, the second multi-arm robot having a second upper arm coupled to the second driven member, a second forearm, a second wrist member, and a second end effector adapted to support a second substrate.

11. The robot apparatus of claim 10 , wherein the first and second first multi-arm robots comprise SCARA robots.

12. The robot apparatus of claim 10 , comprising third and fourth multi-arm robots coupled to the boom at a second outboard end.

13. The robot apparatus of claim 12 , wherein the third and fourth multi-arm robots comprise SCARA robots.

14. The robot apparatus of claim 10 , comprising a boom pilot shaft extending to the hub and coupled to a boom drive motor.

15. The robot apparatus of claim 10 , comprising a first driving member pilot shaft extending to the first driving member and coupled to a first drive motor.

16. The robot apparatus of claim 10 , comprising a second driving member pilot shaft extending to the second driving member and coupled to a second drive motor.

17. The robot apparatus of claim 10 , comprising first and second forearm driving pulleys non-rotationally coupled to the web.

18. The robot apparatus of claim 10 , comprising an inner shaft coupling the second driven member to the second upper arm, and an outer shaft received over the inner shaft coupled to a first forearm driving pulley and a second forearm driving pulley.

Assignees

• Applied Materials Inc

Inventors

• Hudgens Jeffrey C
• Kremerman Izya
• Brodine Jeffrey A

Classifications

• B25J9/0009 Primary

  Constructional details, e.g. manipulator supports, bases · CPC title

• Y10T74/20329

  Joint between elements · CPC title

• Y10T74/20335

  Wrist · CPC title

• Y10S901/14

  Arm movement, spatial · CPC title

• B25J9/043

  double selective compliance articulated robot arms [SCARA] · CPC title