Probe apparatus
US-12000862-B2 · Jun 4, 2024 · US
Variable pressure four-point coated probe pin device and method
US9030219B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9030219-B2 |
| Application number | US-201313779392-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 27, 2013 |
| Priority date | Mar 1, 2012 |
| Publication date | May 12, 2015 |
| Grant date | May 12, 2015 |
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Abstract
Official abstract text for this publication.
A variable pressure probe pin device, including: a housing with a channel having a first longitudinal axis; a probe at least partially disposed in the channel and including a plurality of probe pins configured to measure a property of a conductive layer; and a fluid pressure system configured to supply pressurized fluid o the channel to control a position of the probe within the channel. The housing or the probe is displaceable such that the plurality of probe pins contact the conductive layer.
First claim
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What is claimed is: 1. A variable pressure probe pin device, comprising: a housing including a channel with a first longitudinal axis; a probe at least partially disposed in the channel and including a plurality of probe pins configured to measure a property of a conductive layer; and, a fluid pressure system configured to supply pressurized fluid to the channel to control a position of the probe within the channel, wherein: the housing or the probe is displaceable such that…
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- G01R1/06705Primary
Physics · mapped topic
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- What does patent US9030219B2 cover?
- A variable pressure probe pin device, including: a housing with a channel having a first longitudinal axis; a probe at least partially disposed in the channel and including a plurality of probe pins configured to measure a property of a conductive layer; and a fluid pressure system configured to supply pressurized fluid o the channel to control a position of the probe within the channel. The ho…
- Who is the assignee on this patent?
- Kla Tencor Corp
- What technology area does this patent fall under?
- Primary CPC classification G01R1/06705. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue May 12 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).