Tungsten deposition on a cobalt surface
US-12065731-B2 · Aug 20, 2024 · US
US9028982B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9028982-B2 |
| Application number | US-99190209-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 2, 2009 |
| Priority date | Aug 19, 2008 |
| Publication date | May 12, 2015 |
| Grant date | May 12, 2015 |
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Disclosed is a composite material wherein adhesion between a silicon surface and a plating material is enhanced. A method and an apparatus for producing the composite material are also disclosed. The method for producing a composite material comprises a dispersion/allocation step wherein the surface of a silicon substrate ( 102 ), which is a matrix provided with a silicon layer at least as the outermost layer, is immersed into a first solution containing gold (Au) ions, so that particulate or island-shaped gold (Au) serving as a first metal and substituted with a part of the silicon layer are dispersed/allocated on the matrix surface, and a plating step wherein the silicon substrate ( 102 ) is immersed into a second solution ( 24 ), which contains a reducing agent to which gold (Au) exhibits catalyst activity and metal ions which can be reduced by the reducing agent, so that the surface of the silicon substrate ( 102 ) is covered with the metal or an alloy of the metal ( 108 ) which is formed by autocatalytic electroless plating using gold (Au) as a starting point.
Opening claim text (preview).
The invention claimed is: 1. A composite material comprising: a matrix having a silicon layer as an uppermost layer; gold particles on a surface of the matrix in shapes of particles or islands, the gold particles displacing part of the silicon layer; and a metal or an alloy of the metal covering the surface of the matrix, the metal or the alloy of the metal being formed by autocatalytic electroless plating and adhering to the surface with an adhesibility such that the metal o…
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