Hybrid-guided block copolymer assembly
US-2015356989-A1 · Dec 10, 2015 · US
US9028704B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9028704-B2 |
| Application number | US-201213659749-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 24, 2012 |
| Priority date | Jun 29, 2012 |
| Publication date | May 12, 2015 |
| Grant date | May 12, 2015 |
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A manufacturing method of a magnetic recording medium includes follows: forming a magnetic recording layer on a substrate; forming an under layer and a metal release layer that forms an alloy with the under layer on the magnetic recording layer in this order and forming an alloyed release layer by alloying the under layer and the metal release layer; forming a mask layer on the alloyed release layer; forming a resist layer on the mask layer; providing a protrusion-recess pattern by patterning the resist layer; transferring the protrusion-recess pattern to the mask layer; transferring the protrusion-recess pattern to the alloyed release layer; transferring the protrusion-recess pattern to the magnetic recording layer; dissolving the alloyed release layer by using a stripping solution and removing a layer formed on the alloyed release layer from an upper side of the magnetic recording layer.
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What is claimed is: 1. A manufacturing method of a magnetic recording medium, comprising: forming a magnetic recording layer on a substrate; forming a first layer and a second layer on the magnetic recording layer and forming an alloyed release layer by alloying the first layer and the second layer; forming a mask layer on the alloyed release layer; forming a resist layer on the mask layer; patterning the resist layer according to a protrusion-recess pattern; transferrin…
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
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