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US-2024391127-A1 · Nov 28, 2024 · US
US9026558B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9026558-B2 |
| Application number | US-90485707-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 28, 2007 |
| Priority date | Mar 1, 2003 |
| Publication date | May 5, 2015 |
| Grant date | May 5, 2015 |
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Official abstract text for this publication.
A connection to an item of equipment is detected. An equipment class of the item of equipment is determined. A selection of an attribute associated with the item of equipment is received. An attribute record corresponding to the equipment class of the item of equipment and the selected attribute is retrieved from a database, wherein the attribute record enables a retrieval of a value of the selected attribute from the item of equipment.
Opening claim text (preview).
What is claimed is: 1. A method of testing semiconductor processing equipment by a diagnostic apparatus, comprising: detecting a connection to a mainframe of the semiconductor processing equipment, the mainframe providing a communication interface to one or more processing chambers physically coupled to the mainframe, wherein the one or more processing chambers perform semiconductor fabrication processes; determining, with the diagnostic apparatus, an equipment class of the main…
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