Predictive technique for dispensing product from tractor tool
US-2024045437-A1 · Feb 8, 2024 · US
US9023716B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9023716-B2 |
| Application number | US-201414147718-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 6, 2014 |
| Priority date | Jan 25, 2013 |
| Publication date | May 5, 2015 |
| Grant date | May 5, 2015 |
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Official abstract text for this publication.
A method for processing substrates includes providing a bonding layer between a substrate and a carrier to bond the substrate to the carrier, processing the substrate while the substrate is supported by the carrier, and removing the bonding layer to separate the substrate from the carrier. The bonding layer may include a thermosetting release layer and thermosetting glue layers, wherein at least one of the thermosetting glue layers is provided on each side of the thermosetting release layer.
Opening claim text (preview).
What is claimed is: 1. A method for processing a substrate, the method comprising: providing a bonding layer between the substrate and a carrier to bond the substrate to the carrier; processing the substrate while the substrate is supported by the carrier; and removing the bonding layer to separate the substrate from the carrier, wherein the bonding layer includes a thermosetting release layer and thermosetting glue layers, and wherein at least one of the thermosetting glue…
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