Cassette housing, prober, server rack, and storage system
US-2024014061-A1 · Jan 11, 2024 · US
Wafer stocker
US9022232B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9022232-B2 |
| Application number | US-201213470362-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 14, 2012 |
| Priority date | Jan 10, 2012 |
| Publication date | May 5, 2015 |
| Grant date | May 5, 2015 |
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Abstract
Official abstract text for this publication.
A wafer stocker is provided in present invention including a main body having an opening communicating with an inner accommodation space, a plurality of storage cells for wafer pod disposed in the main body, and an embedded storage shelf mounting in the accommodation space of the main body via the opening, the embedded storage shelf is provided with a plurality of storage cells for wafer pods which may combine with the storage cells in the main body to serve jointly as the storage cells of the entire wafer stocker, wherein the embedded storage shelf may be removed from the accommodation space to be replaced with an embedded wafer sorter.
First claim
Opening claim text (preview).
What is claimed is: 1. A wafer stocker, comprising: a main body having an opening communicating with an inner accommodation space; a plurality of storage cells for wafer pods disposed in said main body; an embedded storage shelf mounted in said accommodation space of said main body via said opening, said embedded storage shelf is provided with a plurality of storage cells for wafer pods, wherein each said storage cell of said embedded storage shelf is identical to said storage…
Assignees
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Classifications
- H10P72/3404Primary
Electricity · mapped topic
- H01L21/67769Primary
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9022232B2 cover?
- A wafer stocker is provided in present invention including a main body having an opening communicating with an inner accommodation space, a plurality of storage cells for wafer pod disposed in the main body, and an embedded storage shelf mounting in the accommodation space of the main body via the opening, the embedded storage shelf is provided with a plurality of storage cells for wafer pods w…
- Who is the assignee on this patent?
- Chang Sheng-Jung, Feng Hang-Hao, Inotera Memories Inc
- What technology area does this patent fall under?
- Primary CPC classification H10P72/3404. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue May 05 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).